We represent and distribute the state-of-the-art plasma tools that bring advantages to the applications.

  • plasma process diagnostics and plasma spectra analysis
  • plasma process monitoring and controlling
  • online QA/QC for plasma process
  • power supply for high quality deposition, bias in MF and HIPIMS fields
  • turnkey solution of pulse plasma nitriding for automobile parts, CNC tools, molds, etc.
  • linear microwave plasma source, microwave power supply, and all related microwave components.
  • MEMS cluster tool, DLC coating tool
  • high performance magnetron sputtering sources in round, rectangular shapes