生產用電漿光譜監控系統 EMICON SA

生產用電漿光譜監控系統 EMICON SA

The EMICON SA systems are especially designed for application regarding quality assurance and process control in industrial plamts and production lines. The integrated processor unit ensures stand-alone operation in 24/7 mode and easy integration of the EMICON SA system into the system conrol by e.g. LAN or Profibus.

The spectral range of 200-1100 nm of the spectrometer units of the EMICON SA systems covers the complete UV-VIS-NIR range. The EMICON SA system can be equipped with up to eight spectrometer channels. In addition several voltage inputs are available to take in signal from external sensors such as lambda probes or target voltage. The sytem can easily be accessed and configured by the EMICON SA Manger software via LAN-interface and LAN and Profibus interfacaes are available for system integration.
The EMICON SA system software provides extensive features especially for plasma monitoring and process control: recipe manager, arithmetic of spectra, automatic, replay of saved data, scaling of response curve and much more.

SA

EMICON SA Features:

Specifications

EMICON SA
Stand-Alone
Number of Spectrometer Channels 1 – 8
Wavelength range [nm] 200 – 1100
Spectral resolution [nm] 1.5
Voltage sensor 2-4
Signal resolution 16 bit
Digital in/out 8 / 8
Analog out 4 – 8
Connectivity LAN / Profibus

Applications

Process control in reactive sputter applications(gas flow/power)
Quality assurance of process stability
Endpoint detection in etching application
Control of ion density in HIPIMS processes
Monitoring and identifying plasma impurities
Spatially resolved process monitoring and control of large area applications

Features

Stand-Alone operation (24/7)
Setpoint functions and PID closed loop functions for process control
Multi-channel systems for spatially resolved data acquisition
Voltage inputs for external sensor signals (e.g. λ-probe, target voltage, …)
Digital and analog inputs and outputs for system integration
PROFIBUS and LAN interface for system integration
Configuration via LAN with Windows based software

Technical Data

Spectral range: 200 … 1100 nm
Spectral resolution: 1.5 nm
1-8 spectrometer channels
Time resolution: 1 ms to minutes
Voltage inputs: 0-10 Volt
Analog outputs: 0-10 Volt
Digital inputs and outputs: 5 Volt (TTL) or 24 Volt
Integrated touch panel display
LAN interface (TCP/IP)

 

EMICON SA Key Notes

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Applications:

  • Thin-film technology (PVD, PECVD)
  • Reactive magnetron sputtering and HIPIMS
  • Plasma etching, endpoint detection
  • Quality assurance and fault detection
  • Retrofitting and upgrade of PEM systems