Good coating protection by a honey comb protection device in front of a quartz collimator lens (PECVD process)

On a PECVD process to coat SiO2 layer with SiH4 precursor reacted with oxygen, a quartz collimator with a honey comb protection device in the front to be mounted onto a KF25 flange.

setup of the collimator onto a KF25 flange

 

installation of the collimator with a rigid optical fiber via a KF25 optical vacuum flange

 

After the coating process, the collimator was taken out for inspection of the coating contamination on the collimator.

moving out the collimator after PECVD coating

 

An unknown layer was coated on the tip of the honey comb protection device.

an unknown coating layer on the tip position of the honey comb protection device

 

Split out the honey comb protection device and the collimator lens.  It is obvious that no coating contamination is found on the optical quartz lens and the end of the honey comb.  Both are very clean.  The conclusion is the optical quartz lens can be 100% well-protected by this honey comb protection device.