Good coating protection by a honey comb protection device in front of a quartz collimator lens (PECVD process)

On a PECVD process to coat SiO2 layer with SiH4 precursor reacted with oxygen, a quartz collimator with a honey comb protection device in the front to be mounted onto a KF25 flange.

setup of the collimator onto a KF25 flange

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