Recenly lots of requests on advanced coating configuration in HIPIMS magnetron sputtering: higher deposition rate and high coating layer quality are key demands. With HIPIMS magnetron sputtering, to have the highest thin film quality is for sure, however, the slow deposition rate is still a big concern comparing to MF magnetron sputtering. How to combine both advantages (high quality and high deposition rate) and how to perform the optimized coating layer in a reasonable and cost-effective configuration become a hot topic for R&D and industrials.
Magpuls Power supply can switch the output mode either MF or HIPIMS. And a special function to combine both in hybrid output waveform pattern via. a built-in PulsTrain waveform editor in the pulse unit. Recipes can be saved and recalled easily. For remote control, a full control over all parameters (time-settings, arc-settings, operating mode changing) to proceed the real-time online dynamic adjustments and controlling can be achieved via a LAN communication to a PC software which end user can design a special remote-control program running on the remote control PC. An EMICON system is the key technology to govern the film properties and quality. Through EMICON system’s setpoint for a closed loop PID control over the flow rate of MFC, the output voltage of a power supply, or even the pulse frequency of the pulse power supply, it’s very flexible to handle precisely the quality control of deposited layer in mechanical, optical and electrical properties. In the combination with EMICON (plasma emission monitor) online quality control and Magpuls stable output pulse patterned waveform, the plasma impedance can be kept very stable and the film growth has high quality in the best performances. Adding some end point conditions can enhance the power of online quality control in real time mode. Such an advanced coating configuration brings a new era for HIPIMS and MF hybrid coating to create new coating materials and applications.
Wow! It’s a long time not to write an article in this blog. In the past years, a new developed honey comb device which provides a solution to solve the contamination problem on quartz window of view port. From time to time, the contamination onto the quartz (or pyrex) window of the view port coming from the processes of plasma CVD, etching, sputtering, arc PVD, evaportation PVD always raise up the maintenance costs and reduce the productivity. Nowadays a state-of-the-art honey comb device is well-developed.
There are several selections to fit the view port’s type and dimension. With the aid of this honey comb protection device, the quartz (or pyrex) window can be protected not to be contaminated. It’s also very easy to clean this device by following some simple instructions.
We are very appreciated in the pictures provided by PLASUS.