{"id":124,"date":"2011-12-19T23:42:38","date_gmt":"2011-12-19T15:42:38","guid":{"rendered":"http:\/\/aot-tek.com\/plasma-circus\/?p=124"},"modified":"2024-05-24T18:02:54","modified_gmt":"2024-05-24T10:02:54","slug":"%e6%96%b0%e4%b8%80%e4%bb%a3%e7%9a%84oes-emicon%e5%9c%a8%e7%ad%89%e7%a6%bb%e5%ad%90%e5%b7%a5%e8%89%ba%e5%ba%94%e7%94%a8%e4%b8%8a%e7%9a%84%e9%87%8d%e8%a6%81%e6%80%a7","status":"publish","type":"post","link":"https:\/\/aot-tek.com\/Plasma_Circus\/?p=124","title":{"rendered":"\u65b0\u4e00\u4ee3\u7684OES (EMICON)\u5728\u7b49\u79bb\u5b50\u5de5\u827a\u5e94\u7528\u4e0a\u7684\u91cd\u8981\u6027"},"content":{"rendered":"\n
\n
\n

\u56de\u987e\u7b49\u79bb\u5b50\u5de5\u827a\u4f7f\u7528OES (Optical Emission Spectroscopy)\u7684\u5386\u53f2\uff0c\u65e9\u57281980\u5e74\u4ee3\uff0c\u5df2\u6709\u4e0d\u5c11\u5927\u578b\u7684\u73bb\u7483\u5de5\u4e1a\u5c1d\u8bd5\u4f7f\u7528OES\u6765\u534f\u52a9\u7b49\u79bb\u5b50\u5de5\u827a\u5728\u91cf\u5316\u751f\u4ea7\u7684\u7a33\u5b9a\u6027\uff0c\u540c\u65f6\uff0c\u4e5f\u5229\u7528OES\u7684\u7279\u6b8a\u6027\u80fd\u5f00\u53d1\u7b49\u79bb\u5b50\u5de5\u827a\u80fd\u591f\u4f7f\u7528\u7684\u65b0\u6750\u6599\u30021990\u5e74\u521d\u671f\uff0cOES\u8457\u540d\u7684\u4ee3\u8868\u4ea7\u54c1\u79f0\u4e3aPEM (Plasma Emission Monitor)\u6b63\u5f0f\u5728\u751f\u4ea7\u5927\u697c\u5e37\u5e55\u73bb\u7483\u7684\u7b49\u79bb\u5b50\u6e85\u5c04\u6d41\u6c34\u7ebf\u4e0a\u4f7f\u7528\uff0c\u4ecesingle Low-e\u7684\u80fd\u6e90\u73bb\u7483\u8fdb\u5316\u5230\u66f4\u5177\u8282\u80fd\u6548\u679c\u7684double Low-e\u89c4\u8303\uff0c\u5230\u4e861990\u5e74\u672b\u671f\uff0c\u66f4\u5e94\u7528\u5728\u5e73\u9762\u663e\u793a\u5668\u7684\u9540\u819c\u5de5\u827a\u4e0a\u3002\u57282000\u5e74\u4ee5\u524d\u53d1\u5c55\u7684PEM\uff0c\u591a\u534a\u91c7\u7528 \u7a84\u901a\u6ee4\u5149\u5668 NBPF (Narrow Band-Passed Filter)\u642d\u914d\u4e00\u4e2a\u6781\u4e3a\u7075\u654f\u7684 \u5149\u7535\u500d\u589e\u7ba1 PMT (Photo Multiplier Tube)\uff0c\u900f\u8fc7\u4e00\u5957\u5355\u6676\u7247\u7684\u5904\u7406\u5668\u8ba1\u7b97\u4fa6\u6d4b\u8baf\u53f7\u5f3a\u5ea6\u4e0e\u5185\u90e8\u8bbe\u5b9a\u5f3a\u5ea6\u7684\u5dee\u5f02\uff0c\u5c06\u5dee\u5f02\u503c\u8f93\u51fa\u5230\u63a7\u5236\u53cd\u5e94\u6c14\u4f53\u7684\u6d41\u91cf\u5355\u5143: \u65e9\u671f\u4f7f\u7528\u7684\u591a\u534a\u662f\u4e00\u4e2a \u6d41\u91cf\u8ba1 (flow meter)\u642d\u8f7d\u4e00\u9897 \u538b\u7535\u9676\u74f7\u9600 PZT\u00a0\u00a0(Lead zirconate titanate:\u00a0Pb<\/a>[Zr<\/a>x<\/em><\/sub>Ti<\/a>1-x<\/em><\/sub>]O<\/a>3<\/sub>\u00a00\u2264x<\/em>\u22641)\u00a0valve\uff0c\u53cd\u5e94\u6c14\u4f53\u7684\u6d41\u91cf\u7ecf\u8fc7\u53d8\u5316\uff0c\u518d\u6b21\u4fa6\u6d4b\u7b49\u79bb\u5b50\u7684\u5f3a\u5ea6\uff0c\u4e0d\u65ad\u7528\u56de\u8def\u7684\u65b9\u5f0f\u8fdb\u884c\u4fee\u6b63\uff0c\u8ba9\u5b9e\u9645\u4fa6\u6d4b\u7684\u5f3a\u5ea6\u8d8b\u8fd1\u5185\u90e8\u8bbe\u5b9a\u503c\u3002\u4e3a\u4e86\u7a33\u5b9aPEM\u7684\u63a7\u5236\uff0cPID\u8ba1\u7b97\u7684\u63a7\u5236\u5668\u4e5f\u6210\u4e3aPEM Closed Loop Control (PEM\u95ed\u9501\u56de\u8def\u63a7\u5236)\u4e2d\u5f88\u91cd\u8981\u7684\u4e00\u4e2a\u89d2\u8272\u3002\u7531\u4e8e\u7b49\u79bb\u5b50\u5de5\u827a\u8fdb\u6b65\u8fc5\u901f\uff0c\u52a0\u4e0a\u5e94\u7528\u5e02\u573a\u5feb\u901f\u5f00\u53d1\uff0c\u5bf9\u4e8e\u9540\u819c\u7684\u8d28\u91cf\u8981\u6c42\u8d8a\u6765\u8d8a\u4e25\u82db\u3002\u4e0d\u4ec5\u9540\u819c\u7684\u8d28\u91cf\u5728\u540c\u8d28\u6027(homogeniety: \u9540\u819c\u671f\u95f4\u968f\u8457\u539a\u5ea6\u589e\u52a0\u65f6\u7684\u8d28\u91cf\u5747\u5300\u6027)\u7684\u8981\u6c42\u589e\u9ad8\uff0c\u540c\u65f6\u5bf9\u9540\u819c\u901f\u7387\u7684\u63d0\u5347\u4e5f\u6709\u5f88\u5927\u7684\u671f\u8bb8\u3002<\/p>\n

\"\"<\/a>
SpecLine\u5206\u6790\u7b49\u79bb\u5b50\u5149\u8c31\u7684\u7ed3\u679c (\u611f\u8c22\u5fb7\u56fdPLASUS\u516c\u53f8\u63d0\u4f9b\u56fe\u7247)<\/figcaption><\/figure>\n

\u56e0\u6b64\uff0c2000\u5e74\u5f00\u59cb\uff0c\u65b0\u4e00\u4ee3\u7684PEM (EMICON:\u00a0EMISSION\u00a0CONTROLLER) \u4e0d\u518d\u4f7f\u7528\u9891\u5bbd\u4e0d\u591f\u7cbe\u5bc6\u7684\u7a84\u901a\u6ee4\u5149\u5668\uff0c\u6539\u7528\u7ebf\u6027\u7684\u7535\u8377\u8026\u5408\u5668\u4ef6CCD\uff0c\u5927\u5e45\u63d0\u5347\u5149\u8c31\u7684\u5206\u8fa8\u7387(resolution)\uff0c\u4e0d\u4f46\u8c31\u7ebf\u7684\u4f4d\u7f6e\u51c6\u786e\uff0c\u4e5f\u56e0\u4e3a\u5149\u8c31\u7684\u5206\u8fa8\u7387\u63d0\u5347\uff0c\u628a\u4e3b\u8981\u7528\u6765\u76d1\u63a7\u7684\u539f\u5b50\u8c31\u7ebf\u4e0e\u65c1\u8fb9\u5939\u6742\u7684\u5176\u4ed6\u6742\u8baf\u53ef\u4ee5\u8f7b\u6613\u5730\u5206\u79bb\uff0c\u8ba9\u63a7\u5236\u7684\u8303\u56f4\u52a0\u5927\u4e14\u5927\u5e45\u6539\u5584\u63a7\u5236\u7684\u7cbe\u5ea6\u3002\u8fd9\u5341\u5e74\u5728\u5206\u5149\u4eea\u7684\u5de5\u827a\u4e0a\u6709\u957f\u8db3\u7684\u8fdb\u6b65\uff0c\u4e0d\u4ec5\u5149\u8c31\u7684\u5206\u8fa8\u7387\u8d8a\u6765\u8d8a\u597d\uff0c\u4e5f\u6539\u5584CCD\u7684\u611f\u5149\u5ea6\uff0c\u8fd9\u4e9b\u8fdb\u6b65\u7684\u4f18\u70b9\uff0c\u4e5f\u66ff\u65b0\u4e00\u4ee3\u7684PEM EMICON\u6253\u5f00\u66f4\u591a\u5e94\u7528\u7684\u5e02\u573a\u3002\u867d\u7136\u65b0\u4e00\u4ee3\u7684PEM EMICON\u5728\u4ef7\u683c\u4e0a\u8f83\u65e7\u578b\u7684PEM\u8d35\u4e86\u8bb8\u591a\uff0c\u4f46\u4e0d\u53ef\u62b9\u706d\u7684\uff0c\u65b0\u4e00\u4ee3\u7684PEM EMICON\u63d0\u4f9b\u66f4\u591a\u66f4\u7cbe\u51c6\u7684\u6027\u80fd\u8ba9\u751f\u4ea7\u4e0e\u7814\u53d1\u6709\u66f4\u597d\u7684\u4fe1\u8d56\u5ea6\u4e0e\u53d1\u5c55\u7a7a\u95f4\u3002\u957f\u671f\u4f7f\u7528\u7684\u6210\u672c\u4f30\u7b97\u5374\u662f\u8fdc\u8f83\u65e7\u578b\u8981\u8282\u7701\u4e0d\u5c11\uff0c\u6700\u91cd\u8981\u7684\u662f\u80fd\u591f\u8ba9\u751f\u4ea7\u7ebf\u7a33\u5b9a\uff0c\u589e\u52a0\u4ea7\u80fd\u4e5f\u589e\u52a0\u8425\u6536\u3002<\/p>\n

\u73b0\u4eca\uff0c\u70ed\u95e8\u7684\u5e94\u7528\u5982\uff1a\u5927\u6c14\u7b49\u79bb\u5b50\u3001\u5927\u697c\u5e37\u5e55\u73bb\u7483\u3001\u5e73\u9762\u663e\u793a\u5668\u7684\u751f\u4ea7\u3001\u89e6\u6478\u5c4f\u751f\u4ea7\u3001\u5fae\u673a\u7535\u3001\u592a\u9633\u80fd\u7535\u6c60\u3001\u534a\u5bfc\u4f53\u3001\u88c5\u9970\u9540\u819c\u3001\u8d85\u786c\u819c\u4e0e\u5149\u5b66\u9540\u819c\u90fd\u5fc5\u987b\u642d\u8f09\u65b0\u4e00\u4ee3\u7684PEM EMICON\uff0c\u6765\u4fdd\u969c\u751f\u4ea7\u7684\u7a33\u5b9a\u4e0e\u4fe1\u8d56\u3002<\/p>\n

\u4ee5\u4e0b\u662f\u65b0\u4e00\u4ee3PEM EMICON\u5728\u7b49\u79bb\u5b50\u5de5\u827a\u4e2d\u4e0d\u53ef\u6216\u7f3a\u7684\u51e0\u9879\u91cd\u8981\u7279\u5fb5\uff1a<\/p>\n

    \n
  1. \u5728\u8fc7\u6e21\u533a\u57df(hysteresis region)\u80fd\u5feb\u901f\u6709\u6548\u5730\u7a33\u5b9a\u5728\u8bbe\u5b9a\u70b9<\/li>\n
  2. \u53ef\u63d0\u9ad8\u9540\u819c\u901f\u7387(deposition rate)<\/li>\n
  3. \u53ef\u505a\u7ebf\u4e0a\u7684\u8d28\u91cf\u7ba1\u7406(online QC)<\/li>\n<\/ol>\n
    \"\"<\/a>
    \u78c1\u6ede\u66f2\u7ebf<\/figcaption><\/figure>\n

    \u5bf9\u4e8e\u7b49\u79bb\u5b50\u5de5\u827a\u7cfb\u7edf(\u6216\u8bbe\u5907)\u5546\u800c\u8a00\uff0c\u65b0\u4e00\u4ee3\u7684PEM EMICON\u4e0d\u4f46\u80fd\u591f\u63d0\u5347\u7b49\u79bb\u5b50\u5de5\u827a\u7814\u53d1\u7684\u80fd\u529b\uff0c\u66f4\u53ef\u4ee5\u5efa\u7acb\u81ea\u6211\u7684\u7b49\u79bb\u5b50\u5de5\u827a\u8d44\u6599\u5e93\uff0c\u5927\u5e45\u7f29\u77ed\u5728\u5ba2\u6237\u7aef\u88c5\u673a\u9a8c\u6536\u7684\u65f6\u95f4\uff0c\u4e5f\u80fd\u591f\u63d0\u4f9b\u5ba2\u6237\u5feb\u901f\u7684\u68c0\u4fee\u670d\u52a1\u3002\u7279\u522b\u662f\u6e85\u5c04\u7684\u6d41\u6c34\u7ebf(inline sputter coater)\u4e0e\u6279\u91cf\u578b\u7684\u751f\u4ea7\u673a\u53f0(batch type)\uff0c\u5341\u5206\u9002\u7528\u3002\u9664\u4e86\u7b49\u79bb\u5b50\u5de5\u827a\u7684\u7814\u53d1\uff0c\u540c\u65f6\u4e5f\u517c\u5177\u7b49\u79bb\u5b50\u5de5\u827a\u7cfb\u7edf(\u6216\u8bbe\u5907)\u7684\u9664\u9519\u529f\u80fd\uff0c\u8ba9\u8bbe\u5907\u5546\u6709\u80fd\u529b\u81ea\u6211\u6539\u5584\u8bbe\u5907\u7684\u8bbe\u8ba1\uff0c\u8ba9\u6027\u80fd\u4e0e\u7a33\u5b9a\u6027\u63d0\u5347\u3002<\/p>\n<\/div>\n<\/div>\n","protected":false},"excerpt":{"rendered":"

    \u56de\u987e\u7b49\u79bb\u5b50\u5de5\u827a\u4f7f\u7528OES (Optical Emission Spectroscopy)\u7684\u5386\u53f2\uff0c\u65e9\u57281980\u5e74 […]<\/p>\n","protected":false},"author":2,"featured_media":0,"comment_status":"open","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[13],"tags":[24,17,10,21,25,26,27],"class_list":["post-124","post","type-post","status-publish","format-standard","hentry","category-closed-loop-control","tag-closed-loop-control-2","tag-emicon","tag-oes","tag-pem","tag-pid","tag-pmt","tag-pzt"],"_links":{"self":[{"href":"https:\/\/aot-tek.com\/Plasma_Circus\/index.php?rest_route=\/wp\/v2\/posts\/124","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/aot-tek.com\/Plasma_Circus\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/aot-tek.com\/Plasma_Circus\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/aot-tek.com\/Plasma_Circus\/index.php?rest_route=\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/aot-tek.com\/Plasma_Circus\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=124"}],"version-history":[{"count":2,"href":"https:\/\/aot-tek.com\/Plasma_Circus\/index.php?rest_route=\/wp\/v2\/posts\/124\/revisions"}],"predecessor-version":[{"id":483,"href":"https:\/\/aot-tek.com\/Plasma_Circus\/index.php?rest_route=\/wp\/v2\/posts\/124\/revisions\/483"}],"wp:attachment":[{"href":"https:\/\/aot-tek.com\/Plasma_Circus\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=124"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/aot-tek.com\/Plasma_Circus\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=124"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/aot-tek.com\/Plasma_Circus\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=124"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}