{"id":130,"date":"2011-12-28T15:42:52","date_gmt":"2011-12-28T07:42:52","guid":{"rendered":"http:\/\/aot-tek.com\/plasma-circus\/?p=130"},"modified":"2011-12-28T15:42:52","modified_gmt":"2011-12-28T07:42:52","slug":"good-coating-protection-by-a-honey-comb-protection-device-in-front-of-a-quartz-collimator-lens-pecvd-process","status":"publish","type":"post","link":"https:\/\/aot-tek.com\/Plasma_Circus\/?p=130","title":{"rendered":"Good coating protection by a honey comb protection device in front of a quartz collimator lens (PECVD process)"},"content":{"rendered":"<p>On a PECVD process to coat SiO2 layer with SiH4 precursor reacted with oxygen, a quartz collimator with a honey comb protection device in the front to be mounted onto a KF25 flange.<\/p>\n<figure id=\"attachment_131\" aria-describedby=\"caption-attachment-131\" style=\"width: 650px\" class=\"wp-caption alignleft\"><a href=\"https:\/\/aot-tek.com\/Plasma_Circus\/wp-content\/uploads\/2011\/12\/setup-of-the-collimator-onto-a-KF25-flange.jpg\"><img loading=\"lazy\" decoding=\"async\" class=\"size-large wp-image-131\" title=\"setup of the collimator onto a KF25 flange\" src=\"http:\/\/aot-tek.com\/plasma-circus\/wp-content\/uploads\/2011\/12\/setup-of-the-collimator-onto-a-KF25-flange-768x1024.jpg\" alt=\"\" width=\"650\" height=\"866\" srcset=\"https:\/\/aot-tek.com\/Plasma_Circus\/wp-content\/uploads\/2011\/12\/setup-of-the-collimator-onto-a-KF25-flange-768x1024.jpg 768w, https:\/\/aot-tek.com\/Plasma_Circus\/wp-content\/uploads\/2011\/12\/setup-of-the-collimator-onto-a-KF25-flange-225x300.jpg 225w, https:\/\/aot-tek.com\/Plasma_Circus\/wp-content\/uploads\/2011\/12\/setup-of-the-collimator-onto-a-KF25-flange-1152x1536.jpg 1152w, https:\/\/aot-tek.com\/Plasma_Circus\/wp-content\/uploads\/2011\/12\/setup-of-the-collimator-onto-a-KF25-flange-1536x2048.jpg 1536w, https:\/\/aot-tek.com\/Plasma_Circus\/wp-content\/uploads\/2011\/12\/setup-of-the-collimator-onto-a-KF25-flange.jpg 1600w\" sizes=\"auto, (max-width: 650px) 100vw, 650px\" \/><\/a><figcaption id=\"caption-attachment-131\" class=\"wp-caption-text\">setup of the collimator onto a KF25 flange<\/figcaption><\/figure>\n<p><!--more--><\/p>\n<p>&nbsp;<\/p>\n<figure id=\"attachment_132\" aria-describedby=\"caption-attachment-132\" style=\"width: 650px\" class=\"wp-caption alignleft\"><a href=\"https:\/\/aot-tek.com\/Plasma_Circus\/wp-content\/uploads\/2011\/12\/installation-of-the-collimator-with-a-rigid-optical-fiber-via-a-KF25-optical-vacuum-flange.jpg\"><img loading=\"lazy\" decoding=\"async\" class=\"size-large wp-image-132\" title=\"installation of the collimator with a rigid optical fiber via a KF25 optical vacuum flange\" src=\"http:\/\/aot-tek.com\/plasma-circus\/wp-content\/uploads\/2011\/12\/installation-of-the-collimator-with-a-rigid-optical-fiber-via-a-KF25-optical-vacuum-flange-1024x767.jpg\" alt=\"\" width=\"650\" height=\"486\" \/><\/a><figcaption id=\"caption-attachment-132\" class=\"wp-caption-text\">installation of the collimator with a rigid optical fiber via a KF25 optical vacuum flange<\/figcaption><\/figure>\n<p><!--more--><\/p>\n<p>&nbsp;<\/p>\n<p>After the coating process, the collimator was taken out for inspection of the coating contamination on the collimator.<\/p>\n<figure id=\"attachment_133\" aria-describedby=\"caption-attachment-133\" style=\"width: 650px\" class=\"wp-caption alignleft\"><a href=\"https:\/\/aot-tek.com\/Plasma_Circus\/wp-content\/uploads\/2011\/12\/moving-out-the-collimator-after-PECVD-coating.jpg\"><img loading=\"lazy\" decoding=\"async\" class=\"size-large wp-image-133\" title=\"moving out the collimator after PECVD coating\" src=\"http:\/\/aot-tek.com\/plasma-circus\/wp-content\/uploads\/2011\/12\/moving-out-the-collimator-after-PECVD-coating-1024x768.jpg\" alt=\"\" width=\"650\" height=\"487\" srcset=\"https:\/\/aot-tek.com\/Plasma_Circus\/wp-content\/uploads\/2011\/12\/moving-out-the-collimator-after-PECVD-coating-1024x768.jpg 1024w, https:\/\/aot-tek.com\/Plasma_Circus\/wp-content\/uploads\/2011\/12\/moving-out-the-collimator-after-PECVD-coating-300x225.jpg 300w, https:\/\/aot-tek.com\/Plasma_Circus\/wp-content\/uploads\/2011\/12\/moving-out-the-collimator-after-PECVD-coating-768x576.jpg 768w, https:\/\/aot-tek.com\/Plasma_Circus\/wp-content\/uploads\/2011\/12\/moving-out-the-collimator-after-PECVD-coating-1536x1152.jpg 1536w, https:\/\/aot-tek.com\/Plasma_Circus\/wp-content\/uploads\/2011\/12\/moving-out-the-collimator-after-PECVD-coating.jpg 1600w\" sizes=\"auto, (max-width: 650px) 100vw, 650px\" \/><\/a><figcaption id=\"caption-attachment-133\" class=\"wp-caption-text\">moving out the collimator after PECVD coating<\/figcaption><\/figure>\n<p><!--more--><\/p>\n<p>&nbsp;<\/p>\n<p>An unknown layer was coated on the tip of the honey comb protection device.<\/p>\n<figure id=\"attachment_134\" aria-describedby=\"caption-attachment-134\" style=\"width: 650px\" class=\"wp-caption alignleft\"><a href=\"https:\/\/aot-tek.com\/Plasma_Circus\/wp-content\/uploads\/2011\/12\/an-unknown-coating-layer-on-the-tip-position-of-the-honey-comb-protection-device.jpg\"><img loading=\"lazy\" decoding=\"async\" class=\"size-large wp-image-134\" title=\"an unknown coating layer on the tip position of the honey comb protection device\" src=\"http:\/\/aot-tek.com\/plasma-circus\/wp-content\/uploads\/2011\/12\/an-unknown-coating-layer-on-the-tip-position-of-the-honey-comb-protection-device-1024x768.jpg\" alt=\"\" width=\"650\" height=\"487\" srcset=\"https:\/\/aot-tek.com\/Plasma_Circus\/wp-content\/uploads\/2011\/12\/an-unknown-coating-layer-on-the-tip-position-of-the-honey-comb-protection-device-1024x768.jpg 1024w, https:\/\/aot-tek.com\/Plasma_Circus\/wp-content\/uploads\/2011\/12\/an-unknown-coating-layer-on-the-tip-position-of-the-honey-comb-protection-device-300x225.jpg 300w, https:\/\/aot-tek.com\/Plasma_Circus\/wp-content\/uploads\/2011\/12\/an-unknown-coating-layer-on-the-tip-position-of-the-honey-comb-protection-device-768x576.jpg 768w, https:\/\/aot-tek.com\/Plasma_Circus\/wp-content\/uploads\/2011\/12\/an-unknown-coating-layer-on-the-tip-position-of-the-honey-comb-protection-device-1536x1152.jpg 1536w, https:\/\/aot-tek.com\/Plasma_Circus\/wp-content\/uploads\/2011\/12\/an-unknown-coating-layer-on-the-tip-position-of-the-honey-comb-protection-device.jpg 1600w\" sizes=\"auto, (max-width: 650px) 100vw, 650px\" \/><\/a><figcaption id=\"caption-attachment-134\" class=\"wp-caption-text\">an unknown coating layer on the tip position of the honey comb protection device<\/figcaption><\/figure>\n<p><!--more--><\/p>\n<p>&nbsp;<\/p>\n<p>Split out the honey comb protection device and the collimator lens. \u00a0It is obvious that no coating contamination is found on the optical quartz lens and the end of the honey comb. \u00a0Both are very clean. \u00a0The conclusion is the optical quartz lens can be 100% well-protected by this honey comb protection device.<\/p>\n<p><a href=\"https:\/\/aot-tek.com\/Plasma_Circus\/wp-content\/uploads\/2011\/12\/a-good-evidence-to-show-no-coating-pollution-to-the-inner-part-of-the-optical-lens-and-the-honey-comb.jpg\"><img loading=\"lazy\" decoding=\"async\" class=\"alignleft size-large wp-image-135\" title=\"a good evidence to show no coating pollution to the inner part of the optical lens and the honey comb\" src=\"http:\/\/aot-tek.com\/plasma-circus\/wp-content\/uploads\/2011\/12\/a-good-evidence-to-show-no-coating-pollution-to-the-inner-part-of-the-optical-lens-and-the-honey-comb-1024x768.jpg\" alt=\"\" width=\"650\" height=\"487\" srcset=\"https:\/\/aot-tek.com\/Plasma_Circus\/wp-content\/uploads\/2011\/12\/a-good-evidence-to-show-no-coating-pollution-to-the-inner-part-of-the-optical-lens-and-the-honey-comb-1024x768.jpg 1024w, https:\/\/aot-tek.com\/Plasma_Circus\/wp-content\/uploads\/2011\/12\/a-good-evidence-to-show-no-coating-pollution-to-the-inner-part-of-the-optical-lens-and-the-honey-comb-300x225.jpg 300w, https:\/\/aot-tek.com\/Plasma_Circus\/wp-content\/uploads\/2011\/12\/a-good-evidence-to-show-no-coating-pollution-to-the-inner-part-of-the-optical-lens-and-the-honey-comb-768x576.jpg 768w, https:\/\/aot-tek.com\/Plasma_Circus\/wp-content\/uploads\/2011\/12\/a-good-evidence-to-show-no-coating-pollution-to-the-inner-part-of-the-optical-lens-and-the-honey-comb-1536x1152.jpg 1536w, https:\/\/aot-tek.com\/Plasma_Circus\/wp-content\/uploads\/2011\/12\/a-good-evidence-to-show-no-coating-pollution-to-the-inner-part-of-the-optical-lens-and-the-honey-comb.jpg 1600w\" sizes=\"auto, (max-width: 650px) 100vw, 650px\" \/><\/a><\/p>\n","protected":false},"excerpt":{"rendered":"<p>On a PECVD process to coat SiO2 layer with SiH4 precurs [&hellip;]<\/p>\n","protected":false},"author":2,"featured_media":0,"comment_status":"open","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[18,29],"tags":[28,16,19,30],"class_list":["post-130","post","type-post","status-publish","format-standard","hentry","category-emicon-accessories","category-optical-parts","tag-coating-contamination","tag-collimator","tag-honey-comb","tag-pecvd"],"_links":{"self":[{"href":"https:\/\/aot-tek.com\/Plasma_Circus\/index.php?rest_route=\/wp\/v2\/posts\/130","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/aot-tek.com\/Plasma_Circus\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/aot-tek.com\/Plasma_Circus\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/aot-tek.com\/Plasma_Circus\/index.php?rest_route=\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/aot-tek.com\/Plasma_Circus\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=130"}],"version-history":[{"count":0,"href":"https:\/\/aot-tek.com\/Plasma_Circus\/index.php?rest_route=\/wp\/v2\/posts\/130\/revisions"}],"wp:attachment":[{"href":"https:\/\/aot-tek.com\/Plasma_Circus\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=130"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/aot-tek.com\/Plasma_Circus\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=130"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/aot-tek.com\/Plasma_Circus\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=130"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}