{"id":36,"date":"2011-09-08T14:23:26","date_gmt":"2011-09-08T06:23:26","guid":{"rendered":"http:\/\/aot-tek.com\/plasma-circus\/?p=36"},"modified":"2011-09-08T14:23:26","modified_gmt":"2011-09-08T06:23:26","slug":"how-long-to-clean-the-protection-device-of-collimator","status":"publish","type":"post","link":"https:\/\/aot-tek.com\/Plasma_Circus\/?p=36","title":{"rendered":"How long to clean the protection device of collimator"},"content":{"rendered":"<p><HR><\/p>\n<h2>\u7e41\u9ad4\u7248<\/h2>\n<p><HR><br \/>\n\u6e96\u76f4\u93e1\u982d\u4e0a\u7684\u8702\u5de2\u5f0f\u9632\u934d\u88dd\u7f6e(honey comb protection device)\uff0c\u4e0d\u662ffilter\uff0c\u9632\u934d\u88dd\u7f6e\u4e0a\u7684\u8702\u5de2\u7d50\u69cb\uff0c\u4e3b\u8981\u662f\u9760\u5167\u5f91\u7684\u5927\u5c0f\u4f86\u963b\u64cb\u539f\u5b50\u8207\u5206\u5b50\u5728\u7279\u6b8a\u771f\u7a7a\u58d3\u529b\u4e0b\u9032\u5165\u8702\u5de2\u5167\u7ba1\u3002\u9019\u662f\u6839\u64da\u81ea\u7531\u5e73\u5747\u8def\u5f91\u7684\u8a08\u7b97\u5f97\u5230\u7684\u7d50\u679c\u3002\u8702\u5de2\u7d50\u69cb\u7684\u6df1\u5ea6(\u6b64\u7ba1\u72c0\u88dd\u7f6e\u7684\u9577\u5ea6)\u6b63\u597d\u5c07\u6240\u6709\u6703\u9032\u5165\u5230\u6df1\u8655\u6c59\u67d3\u5149\u5b78\u93e1\u7247(\u93e1\u982d)\u90fd\u64cb\u4f4f\u3002\u6839\u64da\u6e96\u76f4\u5f91\u982d\u64fa\u653e\u7684\u4f4d\u7f6e\u4f86\u6c7a\u5b9a\u591a\u4e45\u8981\u6e05\u6f54\u4e00\u6b21\u3002PECVD\u7684\u61c9\u7528\uff0c\u5982\u679c\u64fa\u653e\u4f4d\u7f6e\u6b63\u78ba\uff0c\u53ef\u80fd\u5169\u5230\u4e09\u5e74\u7684\u4f7f\u7528\u9084\u4e0d\u9700\u8981\u6e05\u6f54\u3002\u5927\u90e8\u5206\u9700\u8981\u6e05\u6f54\u7684\u61c9\u7528\u6703\u662f\u6ffa\u934d(sputtering)\uff0c\u6709\u4e9b\u64fa\u653e\u4f4d\u7f6e\u6bd4\u8f03\u63a5\u8fd1\u9776\u6750\u934d\u819c\u7684\u8868\u9762\uff0c\u591a\u4e45\u9700\u8981\u6e05\u6f54\u4e00\u6b21\uff0c\u5f88\u96e3\u8aaa\u5f97\u6e96\u3002\u82e5\u64fa\u653e\u5728\u5f88\u8fd1\u934d\u819c\u5340\u57df\u800c\u4e14\u4e00\u5b9a\u6703\u88ab\u934d\u5230\u7684\u4f4d\u7f6e\uff0c\u7576\u934d\u819c\u88fd\u7a0b\u7684\u64cd\u4f5c\u58d3\u529b\u9ad8\uff0c\u81ea\u7531\u5e73\u5747\u8def\u5f91\u77ed\uff0c\u6b64\u6642\u8702\u5de2\u88dd\u7f6e\u7684\u8868\u9762\u5f88\u5feb\u6703\u88ab\u934d\u4e0a\u4e00\u5c64\u539a\u539a\u7684\u934d\u819c\uff0c\u5c31\u9700\u8981\u7d93\u5e38\u6e05\u6f54\u3002\u5982\u679c\u64cd\u4f5c\u58d3\u529b\u4f4e\uff0c\u81ea\u7531\u5e73\u5747\u8def\u5f91\u8b8a\u9577\uff0c\u5728\u8702\u5de2\u88dd\u7f6e\u4e0a\u7684\u934d\u819c\uff0c\u6703\u9032\u5165\u7ba1\u5167\u4e14\u8868\u9762\u4e0a\u7684\u934d\u819c\u96d6\u6703\u589e\u52a0\u4f46\u662f\u589e\u52a0\u901f\u5ea6\u8f03\u6162\uff0c\u6b64\u6642\u6e05\u6f54\u7684\u6642\u9593\u9593\u9694\u6703\u62c9\u9577\u4e0d\u6703\u5f88\u983b\u7e41\u3002\u4f55\u6642\u9700\u8981\u505a\u6e05\u6f54? 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