{"id":497,"date":"2026-05-05T12:27:18","date_gmt":"2026-05-05T04:27:18","guid":{"rendered":"https:\/\/aot-tek.com\/Plasma_Circus\/?p=497"},"modified":"2026-05-05T12:27:19","modified_gmt":"2026-05-05T04:27:19","slug":"%e9%9b%bb%e6%bc%bf%e6%ba%ab%e5%ba%a6%e7%9a%84%e9%87%8f%e6%b8%ac%e6%96%b9%e6%b3%95","status":"publish","type":"post","link":"https:\/\/aot-tek.com\/Plasma_Circus\/%e9%9b%bb%e6%bc%bf%e6%ba%ab%e5%ba%a6%e7%9a%84%e9%87%8f%e6%b8%ac%e6%96%b9%e6%b3%95\/","title":{"rendered":"\u96fb\u6f3f\u6eab\u5ea6\u7684\u91cf\u6e2c\u65b9\u6cd5"},"content":{"rendered":"\n<p class=\"has-text-align-right wp-block-paragraph\">\u5be6\u9a57\u6a21\u578b\u7684\u5efa\u7acb\u8207\u96fb\u6f3f\u6eab\u5ea6\u91cf\u6e2c\u65b9\u6cd5\u7684\u63a2\u8a0e        \u6b50\u7279\u5a01\u79d1\u6280\u80a1\u4efd\u6709\u9650\u516c\u53f8<br>\u6e5b\u672c\u5cb1 2025.4.28<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\u6a21\u578b<\/strong><br>\u6709\u4e00\u500b\u771f\u7a7a\u88fd\u7a0b\u8154\u9ad4\u5b89\u88dd\u4e86\u771f\u7a7a\u62bd\u6c23\u5e6b\u6d66\u7d44\u5408(mechanical pump+roots pump+turbo molecular pump)\u6301\u7e8c\u904b\u8f49\u4e0b\u7dad\u6301\u58d3\u529b\u57283 mtoor\uff0c\u540c\u6642\u4f7f\u7528\u5169\u652f\u8cea\u6d41\u91cf\u8a08(mass flow controller)\u500b\u5225\u5c0e\u5165\u80cc\u666f\u6c23\u9ad4Ar (100 sccm)\u8207\u53cd\u61c9\u6027\u6c23\u9ad4O2 (10 sccm)\uff0c\u5728\u771f\u7a7a\u8154\u9ad4\u5074\u9762\u5668\u58c1\u5167\u5074\u5b89\u88dd\u4e86\u4e00\u652f\u78c1\u63a7\u6ffa\u5c04\u9776\u5ea7\uff0c\u9776\u5ea7\u4e0a\u5b89\u88dd\u4e86\u4e00\u584a\u6c34\u51b7\u7684\u9776\u6750(\u5c3a\u5bf8LxWxD: 800mm x 125mm x 5mm)\uff0c\u9776\u5ea7\u80cc\u9762\u9396\u6b7b\u5728\u8154\u9ad4\u7684\u5167\u5074\uff0c\u4e26\u63a1\u7528\u9ad8\u771f\u7a7a\u7528\u7684O\u74b0 (O-ring)\u5c0d\u9ad8\u58d3\u96fb\u6975\u5c0e\u5165(feedthrough)\u505a\u9ad8\u771f\u7a7a\u7684\u6c23\u5bc6(\u6d29\u6f0f\u7387\u5c0f\u65bc2E-9 torr)\uff0c\u9ad8\u58d3\u96fb\u6975\u5c0e\u5165\u5728\u5927\u6c23\u58d3\u529b\u5074\uff0c\u6b63\u6975\u8207\u8ca0\u6975\u5206\u5225\u63a5\u4e0a\u8108\u885d\u96fb\u6e90\u4f9b\u61c9\u5668\u7684\u6b63\u6975\u8f38\u51fa\u8207\u8ca0\u6975\u8f38\u51fa\uff0c\u9019\u7d44\u8108\u885d\u96fb\u6e90\u4f9b\u61c9\u5668\u53ef\u4ee5\u63d0\u4f9b800V\uff0c35A\u7684\u96fb\u529b\uff0c\u5728\u78c1\u63a7\u628a\u8868\u9762\u7522\u751f\u96fb\u6f3f\u3002\u96fb\u6f3f\u88e1\u9762\u7684\u7d44\u6210\u5143\u7d20\u6709Ar\u8207O2\u3002\u60f3\u8981\u91cf\u6e2c\u78c1\u63a7\u6ffa\u5c04\u9776\u8868\u9762\u7684Ar, O2\u7684\u96e2\u5b50\u6eab\u5ea6\u8207\u5206\u5e03\uff0c\u8acb\u5206\u6790\u4e26\u63d0\u4f9b\u4f7f\u7528\u7834\u58de\u6027\u91cf\u6e2c(destructive measurement)\u8207\u975e\u7834\u58de\u6027\u91cf\u6e2c(non-destructive measurement)\u9019\u5169\u7a2e\u91cf\u6e2c\u65b9\u6cd5\u7684\u5404\u7a2e\u53ef\u80fd\u4f5c\u6cd5\u3002<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\u601d\u8def\u908f\u8f2f\u5206\u6790<\/strong><br>\u91dd\u5c0d\u9019\u500b\u7279\u5b9a\u7684\u78c1\u63a7\u6ffa\u5c04\u8154\u9ad4\u88fd\u7a0b\u74b0\u5883\u4e0b\uff0c\u91cf\u6e2cAr$^+$\u548cO$_2^+\u96e2\u5b50\u7684\u6eab\u5ea6\u8207\u5206\u4f48\uff0c\u8003\u91cf\u5230\u8154\u9ad4\u7d50\u69cb\u3001\u6c23\u9ad4\u7a2e\u985e\u3001\u4ee5\u53ca\u9776\u6750\u5c3a\u5bf8\u7b49\u56e0\u7d20\uff0c\u4ee5\u4e0b\u5206\u6790\u7834\u58de\u6027\u8207\u975e\u7834\u58de\u6027\u91cf\u6e2c\u65b9\u6cd5\u7684\u53ef\u80fd\u4f5c\u6cd5\u3001\u512a\u7f3a\u9ede\u8207\u5be6\u65bd\u4e0a\u7684\u6311\u6230\u3002\u2217\u2217\u91cd\u8981\u8003\u91cf\u56e0\u7d20\uff1a\u2217\u22171.\u2217\u2217\u78c1\u63a7\u6ffa\u5c04\u96fb\u6f3f\u7279\u6027\uff1a\u2217\u2217\u96fb\u6f3f\u5bc6\u5ea6\u9ad8\u3001\u975e\u5747\u52fb\u6027\u5f37\uff0c\u7279\u5225\u662f\u5728\u9776\u6750\u8868\u9762\u9644\u8fd1\u6709\u5f37\u70c8\u7684\u78c1\u5834\u68af\u5ea6\u30022.\u2217\u2217\u9776\u6750\u5c3a\u5bf8\u8207\u4f4d\u7f6e\uff1a\u2217\u2217800mmx125mm\u7684\u5927\u5c3a\u5bf8\u9776\u6750\u56fa\u5b9a\u5728\u8154\u58c1\uff0c\u9650\u5236\u4e86\u8154\u5167\u53ef\u7528\u7684\u7a7a\u9593\uff0c\u4e5f\u4f7f\u5f97\u63a2\u91dd\u6216\u5149\u5b78\u8def\u5f91\u7684\u9032\u5165\u548c\u6383\u63cf\u8b8a\u5f97\u56f0\u96e3\u30023.\u2217\u2217\u53cd\u61c9\u6027\u6c23\u9ad4(O2)\uff1a\u2217\u2217O2\u96fb\u6f3f\u5177\u6709\u6c27\u5316\u6027\uff0c\u53ef\u80fd\u5c0d\u63a2\u91dd\u6216\u5149\u5b78\u8996\u7a97\u9020\u6210\u8150\u8755\u6216\u6c61\u67d3\u30024.\u2217\u2217\u4f4e\u6c23\u58d3(3mTorr)\uff1a\u2217\u2217\u96d6\u7136\u662f\u4f4e\u6c23\u58d3\uff0c\u4f46\u5c0d\u65bc\u96e2\u5b50\u800c\u8a00\u4ecd\u662f\u78b0\u649e\u6027\u74b0\u5883\uff0c\u96e2\u5b50\u80fd\u91cf\u5206\u4f48\u6703\u53d7\u78b0\u649e\u5f71\u97ff\u30025.\u2217\u2217\u8108\u885d\u96fb\u6e90\uff1a\u2217\u2217\u96fb\u6f3f\u53c3\u6578\uff08\u5305\u62ec\u96e2\u5b50\u80fd\u91cf\u5206\u4f48\uff09\u53ef\u80fd\u96a8\u8108\u885d\u8b8a\u5316\uff0c\u9700\u8981\u5177\u5099\u6642\u9593\u89e3\u6790\u5ea6\u7684\u91cf\u6e2c\u80fd\u529b\u3002\u2217\u2217\u91cf\u6e2c\u65b9\u6cd5\u5206\u6790\uff1a\u2217\u2217\u2217\u2217A.\u7834\u58de\u6027\u91cf\u6e2c(DestructiveMeasurement)\u2217\u2217\u9019\u985e\u65b9\u6cd5\u9700\u8981\u5c07\u91cf\u6e2c\u88dd\u7f6e\u63d2\u5165\u5230\u96fb\u6f3f\u4e2d\uff0c\u6703\u5c0d\u96fb\u6f3f\u72c0\u614b\u7522\u751f\u4e00\u5b9a\u7a0b\u5ea6\u7684\u64fe\u52d5\uff0c\u4e14\u88dd\u7f6e\u8868\u9762\u5bb9\u6613\u53d7\u5230\u6ffa\u5c04\u6c89\u7a4d\u7269\u7684\u6c61\u67d3\u30021.\u2217\u2217\u63a2\u91dd\u5f0f\u96e2\u5b50\u80fd\u91cf\u5206\u6790\u5100(Probe\u2212basedRetardingFieldEnergyAnalyzer,RFEA)\u6216\u7d50\u5408\u8cea\u8b5c\u5100\u7684\u63a2\u91dd(Probe\u2212basedMassSpectrometer\/EnergyAnalyzer):\u2217\u2217\u2217\u2217\u2217\u4f5c\u6cd5\uff1a\u2217\u2217\u2217\u5c07\u4e00\u500b\u5e36\u6709\u5c0f\u5b54\uff08\u6216\u591a\u500b\u5c0f\u5b54\uff09\u7684\u63a2\u91dd\u982d\u63d2\u5165\u5230\u96fb\u6f3f\u4e2d\u3002\u63a2\u91dd\u5167\u90e8\u901a\u5e38\u5305\u542b\u591a\u500b\u67f5\u6975\u96fb\u6975\uff0c\u7528\u65bc\u904e\u6ffe\u96fb\u5b50\u4e26\u5c0d\u96e2\u5b50\u65bd\u52a0\u53cd\u5411\u504f\u58d3\uff0c\u5206\u6790\u4e0d\u540c\u80fd\u91cf\u7684\u96e2\u5b50\u6578\u91cf\u3002\u2217\u70ba\u4e86\u5340\u5206Ar^+$\u548cO$_2^+\uff0c\u63a2\u91dd\u9700\u8981\u7d50\u5408\u8cea\u91cf\u5206\u6790\u5668\uff0c\u6700\u5e38\u898b\u7684\u662f\u56db\u6975\u8cea\u8b5c\u5100(QuadrupoleMassSpectrometer,QMS)\u6216\u98db\u884c\u6642\u9593\u8cea\u8b5c\u5100(Time\u2212of\u2212FlightMassSpectrometer,TOF\u2212MS)\u3002\u63a2\u91dd\u982d\u4f5c\u70ba\u53d6\u6a23\u9ede\uff0c\u5c07\u96e2\u5b50\u5f15\u5c0e\u81f3\u8cea\u8b5c\u5100\u9032\u884c\u8cea\u91cf\u7be9\u9078\u548c\u80fd\u91cf\u5206\u6790\u3002\u2217\u900f\u904e\u5728\u4e0d\u540c\u4f4d\u7f6e\u79fb\u52d5\u63a2\u91dd\uff0c\u53ef\u4ee5\u91cf\u6e2c\u96e2\u5b50\u80fd\u91cf\u5206\u4f48\u7684\u7a7a\u9593\u8b8a\u5316\u3002\u2217\u2217\u2217\u91cf\u6e2c\u80fd\u529b\uff1a\u2217\u2217\u53ef\u4ee5\u76f4\u63a5\u91cf\u6e2c\u7279\u5b9a\u4f4d\u7f6e\u8655Ar^+$\u548cO$_2^+\u7684\u96e2\u5b50\u80fd\u91cf\u5206\u4f48\u51fd\u6578(IEDF)\u3002\u96e2\u5b50\u6eab\u5ea6\u53ef\u4ee5\u5f9eIEDF\u7684\u9ad8\u80fd\u5c3e\u90e8\u6216\u901a\u904e\u64ec\u5408\u9ea5\u514b\u65af\u97cb\u5206\u4f48\u4f86\u4f30\u7b97\uff0c\u4f46\u9700\u6ce8\u610f\u78c1\u63a7\u96fb\u6f3f\u7684IEDF\u901a\u5e38\u662f\u975e\u9ea5\u514b\u65af\u97cb\u5206\u4f48\u7684\u3002\u91cf\u6e2c\u4f4d\u7f6e\u6c7a\u5b9a\u4e86\u7a7a\u9593\u5206\u4f48\u7684\u7372\u53d6\u3002\u2217\u2217\u2217\u512a\u9ede\uff1a\u2217\u2217\u53ef\u4ee5\u7372\u5f97\u7a2e\u5225\u7279\u7570\u6027(species\u2212specific)\u7684\u96e2\u5b50\u80fd\u91cf\u5206\u4f48\uff0c\u662f\u76f4\u63a5\u91cf\u6e2c\u96e2\u5b50\u80fd\u91cf\u7684\u6700\u4f73\u65b9\u6cd5\u3002\u2217\u2217\u2217\u7f3a\u9ede\u8207\u6311\u6230\uff1a\u2217\u2217\u2217\u2217\u2217\u7269\u7406\u64fe\u52d5\uff1a\u2217\u2217\u63a2\u91dd\u7684\u63d2\u5165\u6703\u986f\u8457\u64fe\u52d5\u96fb\u6f3f\uff0c\u7279\u5225\u662f\u5728\u9776\u6750\u9644\u8fd1\u7684\u9ad8\u5bc6\u5ea6\u5340\u57df\u3002\u2217\u2217\u2217\u6c89\u7a4d\u6c61\u67d3\uff1a\u2217\u2217\u6ffa\u5c04\u6c89\u7a4d\u7269\u6703\u5728\u63a2\u91dd\u8868\u9762\uff08\u7279\u5225\u662f\u53d6\u6a23\u5b54\uff09\u7d2f\u7a4d\uff0c\u5f71\u97ff\u91cf\u6e2c\u6e96\u78ba\u6027\uff0c\u9700\u8981\u5b9a\u671f\u6e05\u6f54\u6216\u66f4\u63db\u63a2\u91dd\u3002\u2217\u2217\u2217\u71b1\u8ca0\u8f09\uff1a\u2217\u2217\u9ad8\u5bc6\u5ea6\u96fb\u6f3f\u53ef\u80fd\u5c0d\u63a2\u91dd\u9020\u6210\u8f03\u5927\u7684\u71b1\u8ca0\u8f09\u3002\u2217\u2217\u2217\u7a7a\u9593\u9650\u5236\uff1a\u2217\u2217\u9776\u6750\u5c3a\u5bf8\u5927\u4e14\u8cbc\u58c1\u5b89\u88dd\uff0c\u5f88\u96e3\u5728\u9776\u6750\u8868\u9762\u9644\u8fd1\u9032\u884c\u5168\u9762\u7684\u63a2\u91dd\u6383\u63cf\u3002\u53ef\u80fd\u53ea\u80fd\u5728\u96e2\u9776\u6750\u4e00\u5b9a\u8ddd\u96e2\u6216\u8154\u9ad4\u908a\u7de3\u8655\u91cf\u6e2c\u3002\u2217\u2217\u2217\u8108\u885d\u540c\u6b65\uff1a\u2217\u2217\u9700\u8981\u91cf\u6e2c\u8a2d\u5099\u8207\u8108\u885d\u96fb\u6e90\u540c\u6b65\uff0c\u4ee5\u7372\u53d6\u6642\u9593\u5206\u8fa8\u7684IE\u200b\u200bDF\u3002\u2217\u2217\u2217O2\u8150\u8755\uff1a\u2217\u2217O2\u96fb\u6f3f\u53ef\u80fd\u8150\u8755\u63a2\u91dd\u6750\u6599\u3002\u2217\u2217B.\u975e\u7834\u58de\u6027\u91cf\u6e2c(Non\u2212destructiveMeasurement)\u2217\u2217\u9019\u985e\u65b9\u6cd5\u4e0d\u5c07\u91cf\u6e2c\u88dd\u7f6e\u63d2\u5165\u96fb\u6f3f\u5167\u90e8\uff0c\u901a\u5e38\u901a\u904e\u5149\u5b78\u6216\u5f9e\u8154\u58c1\u53d6\u6a23\u7684\u65b9\u5f0f\u9032\u884c\u30021.\u2217\u2217\u5149\u5b78\u767c\u5c04\u5149\u8b5c\u5100(OpticalEmissionSpectroscopy,OES)\uff1a\u2217\u2217\u2217\u2217\u2217\u4f5c\u6cd5\uff1a\u2217\u2217\u2217\u901a\u904e\u8154\u9ad4\u5074\u9762\u7684\u5149\u5b78\u8996\u7a97\u6536\u96c6\u96fb\u6f3f\u767c\u51fa\u7684\u5149\u3002\u2217\u4f7f\u7528\u5149\u8b5c\u5100\u5206\u6790\u5149\u7684\u6ce2\u9577\u548c\u5f37\u5ea6\u3002Ar^+$\u548cO$_2^+$\u90fd\u6709\u7279\u5fb5\u7684\u767c\u5c04\u8b5c\u7dda\u3002 * \u901a\u904e\u72f9\u7e2b\u6216\u5149\u7e96\u63a2\u982d\u5728\u4e0d\u540c\u4f4d\u7f6e\u63a1\u96c6\u5149\u4fe1\u865f\uff0c\u6216\u4f7f\u7528\u5177\u6709\u7a7a\u9593\u89e3\u6790\u5ea6\u7684\u6210\u50cf\u5149\u8b5c\u5100\uff0c\u53ef\u4ee5\u7372\u53d6\u767c\u5c04\u5f37\u5ea6\u7684\u7a7a\u9593\u5206\u4f48\uff0c\u9593\u63a5\u53cd\u6620\u6fc0\u767c\u614b\u96e2\u5b50\u5bc6\u5ea6\u7684\u5206\u4f48\u3002 * <strong>\u96e2\u5b50\u6eab\u5ea6\u4f30\u7b97\uff1a<\/strong> \u53ef\u4ee5\u901a\u904e\u91cf\u6e2c\u7279\u5b9a\u96e2\u5b50\u767c\u5c04\u8b5c\u7dda\u7684<strong>\u591a\u666e\u52d2\u5c55\u5bec (Doppler Broadening)<\/strong> \u4f86\u4f30\u7b97\u96e2\u5b50\u6eab\u5ea6\u3002\u7136\u800c\uff0c\u9019\u9700\u8981\u9ad8\u89e3\u6790\u5ea6\u7684\u5149\u8b5c\u5100\uff0c\u4e26\u4e14\u8981\u6392\u9664\u5176\u4ed6\u5c55\u5bec\u6a5f\u5236\uff08\u5982\u65af\u5854\u514b\u5c55\u5bec\u3001\u58d3\u529b\u5c55\u5bec\u3001\u5100\u5668\u5c55\u5bec\uff09\u7684\u5f71\u97ff\uff0c\u7279\u5225\u662f\u5c0d\u65bc\u5206\u5b50\u96e2\u5b50O$_2^+$\uff0c\u5176\u8b5c\u7dda\u53ef\u80fd\u66f4\u8907\u96dc\u3002 * <strong>\u91cf\u6e2c\u80fd\u529b\uff1a<\/strong> \u53ef\u4ee5\u8b58\u5225\u96fb\u6f3f\u4e2d\u7684\u767c\u5149\u7269\u7a2e\uff08\u5305\u62ec\u96e2\u5b50\uff09\uff0c\u7372\u5f97\u6fc0\u767c\u614b\u96e2\u5b50\u7684\u76f8\u5c0d\u7a7a\u9593\u5206\u4f48\u3002\u53ef\u4ee5\u5617\u8a66\u5229\u7528\u591a\u666e\u52d2\u5c55\u5bec\u4f30\u7b97\u96e2\u5b50\u6eab\u5ea6\uff0c\u4f46\u6e96\u78ba\u6027\u53ef\u80fd\u4e0d\u9ad8\u3002 * <strong>\u512a\u9ede\uff1a<\/strong> \u975e\u4fb5\u5165\u6027\uff0c\u5c0d\u96fb\u6f3f\u64fe\u52d5\u5c0f\uff1b\u8a2d\u5099\u76f8\u5c0d\u5e38\u898b\u3002\u53ef\u4ee5\u5feb\u901f\u7372\u53d6\u5927\u7bc4\u570d\u7684\u7a7a\u9593\u5206\u4f48\u4fe1\u606f\uff08\u5982\u679c\u7d50\u5408\u6383\u63cf\u6216\u6210\u50cf\uff09\u3002 * <strong>\u7f3a\u9ede\u8207\u6311\u6230\uff1a<\/strong> * <strong>\u9593\u63a5\u6027\uff1a<\/strong> OES\u91cf\u6e2c\u7684\u662f\u6fc0\u767c\u614b\u7269\u7a2e\uff0c\u8207\u57fa\u614b\u96e2\u5b50\u5bc6\u5ea6\u548c\u6eab\u5ea6\u4e0d\u662f\u76f4\u63a5\u95dc\u4fc2\uff0c\u4e2d\u9593\u6d89\u53ca\u5230\u8907\u96dc\u7684\u6fc0\u767c\u548c\u8f3b\u5c04\u904e\u7a0b\u3002 * <strong>\u7dda\u7a4d\u5206\uff1a<\/strong> \u6a19\u6e96\u7684OES\u662f\u6cbf\u8457\u8996\u7dda\u65b9\u5411\u7684\u5149\u7a4d\u5206\uff0c\u7372\u53d6\u7cbe\u78ba\u7684\u5c40\u90e8\u7a7a\u9593\u5206\u4f48\u9700\u8981\u65b7\u5c64\u6383\u63cf (Tomography) \u6280\u8853\u6216\u975e\u5e38\u7cbe\u7d30\u7684\u7a7a\u9593\u63a1\u96c6\u3002 * <strong>\u6eab\u5ea6\u91cf\u6e2c\u96e3\u5ea6\uff1a<\/strong> \u5229\u7528\u591a\u666e\u52d2\u5c55\u5bec\u91cf\u6e2c\u96e2\u5b50\u6eab\u5ea6\u9700\u8981\u9ad8\u89e3\u6790\u5ea6\u8a2d\u5099\uff0c\u4e14\u96e3\u4ee5\u6392\u9664\u5176\u4ed6\u5c55\u5bec\u6548\u61c9\uff0c\u5c0dO$_2^+\u5c24\u5176\u56f0\u96e3\u3002\u2217\u2217\u2217\u8996\u7a97\u6c61\u67d3\uff1a\u2217\u2217\u6ffa\u5c04\u6c89\u7a4d\u7269\u6703\u6c61\u67d3\u5149\u5b78\u8996\u7a97\uff0c\u5f71\u97ff\u5149\u4fe1\u865f\u7684\u7a7f\u900f\u30022.\u2217\u2217\u96f7\u5c04\u8a98\u81f4\u87a2\u5149\u5149\u8b5c\u6cd5(Laser\u2212InducedFluorescenceSpectroscopy,LIF)\uff1a\u2217\u2217\u2217\u2217\u2217\u4f5c\u6cd5\uff1a\u2217\u2217\u2217\u4f7f\u7528\u53ef\u8abf\u8ae7\u7684\u96f7\u5c04\u767c\u5c04\u7279\u5b9a\u6ce2\u9577\u7684\u96f7\u5c04\u675f\uff0c\u7cbe\u78ba\u6fc0\u767c\u76ee\u6a19\u96e2\u5b50\uff08Ar^+$\u6216O$_2^+\uff09\u5f9e\u57fa\u614b\uff08\u6216\u4e9e\u7a69\u614b\uff09\u5230\u6fc0\u767c\u614b\u7684\u8e8d\u9077\u3002\u2217\u91cf\u6e2c\u96e2\u5b50\u5f9e\u6fc0\u767c\u614b\u8e8d\u9077\u56de\u57fa\u614b\u6216\u5176\u4ed6\u4e9e\u7a69\u614b\u6642\u767c\u51fa\u7684\u87a2\u5149\u4fe1\u865f\u3002\u2217\u901a\u904e\u6383\u63cf\u96f7\u5c04\u7684\u983b\u7387\uff0c\u53ef\u4ee5\u7372\u5f97\u96e2\u5b50\u5438\u6536\u8b5c\u7dda\u7684\u8f2a\u5ed3\u3002\u8b5c\u7dda\u7684\u2217\u2217\u591a\u666e\u52d2\u5c55\u5bec\u2217\u2217\u76f4\u63a5\u53cd\u6620\u4e86\u96e2\u5b50\u7684\u901f\u5ea6\u5206\u4f48\uff0c\u5f9e\u800c\u8a08\u7b97\u51fa\u96e2\u5b50\u6eab\u5ea6\u3002\u2217\u901a\u904e\u805a\u7126\u96f7\u5c04\u675f\u548c\/\u6216\u6536\u96c6\u87a2\u5149\u7684\u7a7a\u9593\u5340\u57df\uff0c\u53ef\u4ee5\u5be6\u73fe\u5f88\u9ad8\u7684\u7a7a\u9593\u89e3\u6790\u5ea6\uff0c\u4e26\u901a\u904e\u6383\u63cf\u96f7\u5c04\u675f\u6216\u63a1\u96c6\u5149\u5b78\u7cfb\u7d71\u4f86\u7372\u53d6\u7a7a\u9593\u5206\u4f48\u3002\u2217\u2217\u2217\u91cf\u6e2c\u80fd\u529b\uff1a\u2217\u2217\u53ef\u4ee5\u76f4\u63a5\u91cf\u6e2c\u7279\u5b9a\u96e2\u5b50\u7a2e\u5225\u5728\u7279\u5b9a\u7a7a\u9593\u9ede\u7684\u2217\u2217\u901f\u5ea6\u5206\u4f48\u51fd\u6578\u2217\u2217\uff0c\u5f9e\u800c\u7cbe\u78ba\u7372\u5f97\u96e2\u5b50\u6eab\u5ea6\u3002\u901a\u904e\u6383\u63cf\u53ef\u4ee5\u7372\u5f97\u5bc6\u5ea6\u548c\u6eab\u5ea6\u7684\u7a7a\u9593\u5206\u4f48\u3002\u2217\u2217\u2217\u512a\u9ede\uff1a\u2217\u2217\u9ad8\u7a2e\u5225\u7279\u7570\u6027\u3001\u9ad8\u7a7a\u9593\u89e3\u6790\u5ea6\u3001\u9ad8\u6642\u9593\u89e3\u6790\u5ea6\uff08\u5982\u679c\u4f7f\u7528\u8108\u885d\u96f7\u5c04\u4e26\u8207\u96fb\u6f3f\u8108\u885d\u540c\u6b65\uff09\u3002\u662f\u76ee\u524d\u91cf\u6e2c\u96e2\u5b50\u901f\u5ea6\u5206\u4f48\uff08\u6eab\u5ea6\uff09\u548c\u5bc6\u5ea6\u5206\u4f48\u6700\u7cbe\u78ba\u7684\u975e\u7834\u58de\u6027\u65b9\u6cd5\u4e4b\u4e00\u3002\u2217\u2217\u2217\u7f3a\u9ede\u8207\u6311\u6230\uff1a\u2217\u2217\u2217\u2217\u2217\u8a2d\u5099\u6602\u8cb4\u8907\u96dc\uff1a\u2217\u2217\u9700\u8981\u6602\u8cb4\u7684\u53ef\u8abf\u8ae7\u96f7\u5c04\u7cfb\u7d71\u3001\u9ad8\u9748\u654f\u5ea6\u63a2\u6e2c\u5668\u548c\u8907\u96dc\u7684\u5149\u5b78\u8a2d\u7f6e\u3002\u2217\u2217\u2217\u9700\u8981\u5408\u9069\u7684\u80fd\u7d1a\uff1a\u2217\u2217\u9700\u8981\u76ee\u6a19\u96e2\u5b50\uff08Ar^+$\uff0cO$_2^+$\uff09\u5b58\u5728\u5408\u9069\u7684\u80fd\u7d1a\u7d50\u69cb\u548c\u8e8d\u9077\u6ce2\u9577\uff0c\u4e14\u96f7\u5c04\u6ce2\u9577\u9700\u8981\u8207\u4e4b\u5339\u914d\uff08\u901a\u5e38\u9700\u8981\u7d2b\u5916\u6216\u53ef\u898b\u5149\u6ce2\u6bb5\uff09\u3002O$_2^+\u7684\u80fd\u7d1a\u7d50\u69cb\u8907\u96dc\uff0c\u9078\u64c7\u5408\u9069\u7684\u8e8d\u9077\u53ef\u80fd\u9700\u8981\u6df1\u5165\u7814\u7a76\u3002\u2217\u2217\u2217\u5149\u5b78\u901a\u9054\uff1a\u2217\u2217\u9700\u8981\u81f3\u5c11\u5169\u500b\uff08\u901a\u5e38\u662f\u76f8\u4e92\u5782\u76f4\u7684\uff09\u5149\u5b78\u8996\u7a97\uff0c\u4e00\u500b\u7528\u65bc\u5f15\u5165\u96f7\u5c04\uff0c\u4e00\u500b\u7528\u65bc\u6536\u96c6\u87a2\u5149\u3002\u5c0d\u65bc\u5927\u5c3a\u5bf8\u9776\u6750\uff0c\u5728\u9776\u6750\u9644\u8fd1\u5be6\u73fe\u5168\u9762\u7684\u7a7a\u9593\u6383\u63cf\u53ef\u80fd\u53d7\u9650\u65bc\u8996\u7a97\u4f4d\u7f6e\u3002\u2217\u2217\u2217\u80cc\u666f\u96dc\u8a0a\uff1a\u2217\u2217\u9700\u8981\u6291\u5236\u96fb\u6f3f\u81ea\u8eab\u7684\u767c\u5c04\u5149\u3002\u2217\u2217\u2217\u8996\u7a97\u6c61\u67d3\uff1a\u2217\u2217\u8996\u7a97\u6c61\u67d3\u6703\u5f71\u97ff\u96f7\u5c04\u7684\u5c0e\u5165\u548c\u87a2\u5149\u7684\u6536\u96c6\u30023.\u2217\u2217\u8154\u58c1\u53d6\u6a23\u8cea\u8b5c\u5100(Wall\u2212samplingMassSpectrometer\/EnergyAnalyzer):\u2217\u2217\u2217\u2217\u2217\u4f5c\u6cd5\uff1a\u2217\u2217\u2217\u5728\u8154\u58c1\u4e0a\u958b\u4e00\u500b\u5e36\u6709\u5c0f\u5b54\u7684\u53d6\u6a23\u53e3\uff08\u901a\u5e38\u9700\u8981\u5dee\u5206\u62bd\u6c23\u7cfb\u7d71\u4ee5\u7dad\u6301\u8cea\u8b5c\u5100\u6240\u9700\u7684\u9ad8\u771f\u7a7a\uff09\u3002\u2217\u5c07\u8cea\u91cf\u5206\u6790\u5668\uff08\u5982QMS\u6216TOF\u2212MS\uff09\u76f4\u63a5\u6216\u901a\u904e\u50b3\u8f38\u5149\u5b78\u8207\u53d6\u6a23\u53e3\u9023\u63a5\u3002\u2217\u5728\u53d6\u6a23\u53e3\u524d\u65b9\u6216\u8cea\u8b5c\u5100\u5167\u90e8\u6dfb\u52a0\u975c\u96fb\u67f5\u6975\uff0c\u7528\u65bc\u5c0d\u901a\u904e\u5c0f\u5b54\u7684\u96e2\u5b50\u9032\u884c\u80fd\u91cf\u5206\u6790(ExtractiveIEDF)\u3002\u2217\u2217\u2217\u91cf\u6e2c\u80fd\u529b\uff1a\u2217\u2217\u53ef\u4ee5\u91cf\u6e2c\u5230\u9054\u53d6\u6a23\u53e3\u4f4d\u7f6e\u7684Ar^+$\u548cO$_2^+\u96e2\u5b50\u7684\u2217\u2217\u80fd\u91cf\u5206\u4f48\u2217\u2217\u3002\u9019\u53cd\u6620\u7684\u662f\u96e2\u5b50\u5728\u6700\u5f8c\u5230\u9054\u8154\u58c1\u524d\u7684\u884c\u70ba\uff0c\u8207\u9ad4\u76f8\u96fb\u6f3f\u4e2d\u7684\u96e2\u5b50\u80fd\u91cf\u5206\u4f48\u53ef\u80fd\u4e0d\u540c\uff08\u53d7\u9798\u5c64\u96fb\u4f4d\u5f71\u97ff\uff09\u3002\u53ef\u4ee5\u8b58\u5225\u96e2\u5b50\u7a2e\u985e\u3002\u2217\u2217\u2217\u512a\u9ede\uff1a\u2217\u2217\u975e\u4fb5\u5165\u96fb\u6f3f\u9ad4\u76f8\uff1b\u53ef\u4ee5\u8b58\u5225\u96e2\u5b50\u7a2e\u985e\u4e26\u91cf\u6e2c\u5230\u9054\u58c1\u9762\u7684\u96e2\u5b50\u80fd\u91cf\uff1b\u76f8\u8f03\u65bc\u63a2\u91dd\u66f4\u5bb9\u6613\u5be6\u73fe\u9577\u6642\u9593\u91cf\u6e2c\uff08\u5982\u679c\u53d6\u6a23\u5b54\u8a2d\u8a08\u5408\u7406\uff09\u3002\u2217\u2217\u2217\u7f3a\u9ede\u8207\u6311\u6230\uff1a\u2217\u2217\u2217\u2217\u2217\u91cf\u6e2c\u4f4d\u7f6e\u9650\u5236\uff1a\u2217\u2217\u53ea\u80fd\u91cf\u6e2c\u5230\u9054\u8154\u58c1\u53d6\u6a23\u53e3\u7684\u96e2\u5b50\uff0c\u7121\u6cd5\u76f4\u63a5\u91cf\u6e2c\u9ad4\u76f8\u96fb\u6f3f\u4e2d\u7684\u5206\u4f48\u3002\u82e5\u8981\u7372\u53d6\u7a7a\u9593\u5206\u4f48\uff0c\u9700\u8981\u5728\u4e0d\u540c\u58c1\u9762\u4f4d\u7f6e\u958b\u8a2d\u591a\u500b\u53d6\u6a23\u53e3\uff0c\u9019\u5c0d\u8154\u9ad4\u6539\u9020\u8981\u6c42\u9ad8\u3002\u2217\u2217\u2217\u9798\u5c64\u6548\u61c9\uff1a\u2217\u2217\u91cf\u6e2c\u5230\u7684\u96e2\u5b50\u80fd\u91cf\u5206\u4f48\u53d7\u5230\u58c1\u9762\u9644\u8fd1\u9798\u5c64\u96fb\u4f4d\u7684\u5f71\u97ff\u3002\u2217\u2217\u2217\u53d6\u6a23\u5b54\u6c61\u67d3\uff1a\u2217\u2217\u6ffa\u5c04\u6c89\u7a4d\u7269\u6703\u5835\u585e\u6216\u6539\u8b8a\u53d6\u6a23\u5b54\u7684\u7279\u6027\u3002\u2217\u2217\u2217\u80fd\u91cf\u5206\u6790\u5668\u7684\u9650\u5236\uff1a\u2217\u2217\u80fd\u91cf\u5206\u6790\u7684\u7bc4\u570d\u548c\u89e3\u6790\u5ea6\u53d7\u8a2d\u5099\u9650\u5236\u3002<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\u7e3d\u7d50\u8207\u5efa\u8b70<\/strong><br>\u5728\u9019\u500b\u7279\u5b9a\u7684\u5834\u666f\u4e0b\uff0c\u5168\u9762\u3001\u6e96\u78ba\u5730\u91cf\u6e2cAr^+$\u548cO$_2^+$\u96e2\u5b50\u7684\u6eab\u5ea6\u8207\u7a7a\u9593\u5206\u4f48\u662f<strong>\u975e\u5e38\u5177\u6709\u6311\u6230\u6027<\/strong>\u7684\u3002<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u7834\u58de\u6027\u65b9\u6cd5 (\u63a2\u91dd):<\/strong> \u96d6\u7136\u80fd\u76f4\u63a5\u91cf\u6e2c\u96e2\u5b50\u80fd\u91cf\uff0c\u4f46\u7531\u65bc\u5927\u5c3a\u5bf8\u9776\u6750\u548c\u7a7a\u9593\u9650\u5236\uff0c\u5f88\u96e3\u5728\u9776\u6750\u9644\u8fd1\u9032\u884c\u5168\u9762\u7684\u7a7a\u9593\u6383\u63cf\uff0c\u4e14\u63a2\u91dd\u6c61\u67d3\u662f\u500b\u5927\u554f\u984c\u3002\u53ef\u80fd\u53ea\u80fd\u4f5c\u70ba\u5728\u7279\u5b9a\u53ef\u9032\u5165\u9ede\u9032\u884c\u5c40\u90e8\u91cf\u6e2c\u7684\u624b\u6bb5\u3002<\/li>\n\n\n\n<li><strong>\u975e\u7834\u58de\u6027\u65b9\u6cd5:<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>OES:<\/strong> \u6700\u5bb9\u6613\u5be6\u73fe\uff0c\u53ef\u4ee5\u63d0\u4f9b\u5b9a\u6027\u7684\u96e2\u5b50\u7a7a\u9593\u5206\u4f48\u4fe1\u606f\uff0c\u4f46\u96e3\u4ee5\u7cbe\u78ba\u91cf\u6e2c\u96e2\u5b50\u6eab\u5ea6\u3002<\/li>\n\n\n\n<li><strong>LIF:<\/strong> \u662f\u91cf\u6e2c\u96e2\u5b50\u6eab\u5ea6\u548c\u5bc6\u5ea6\u7a7a\u9593\u5206\u4f48\u7684\u9ec3\u91d1\u6a19\u6e96\uff0c\u4f46\u8a2d\u5099\u6602\u8cb4\u3001\u8907\u96dc\uff0c\u4e14\u9700\u8981\u5408\u9069\u7684\u5149\u5b78\u901a\u9054\u548c\u5339\u914d\u7684\u96f7\u5c04\u6ce2\u9577\uff0c\u5c24\u5176O$_2^+\u7684\u96f7\u5c04\u8981\u6c42\u9ad8\u3002\u5982\u679c\u80fd\u514b\u670d\u9019\u4e9b\u56f0\u96e3\uff0cLIF\u662f\u7372\u53d6\u9ad4\u76f8\u96fb\u6f3f\u4e2d\u7cbe\u78ba\u4fe1\u606f\u7684\u6700\u4f73\u9078\u64c7\u3002\u2217\u2217\u2217\u8154\u58c1\u53d6\u6a23\u8cea\u8b5c\u5100:\u2217\u2217\u53ef\u4ee5\u7372\u53d6\u5230\u9054\u8154\u58c1\u7684\u96e2\u5b50\u80fd\u91cf\u5206\u4f48\uff0c\u63d0\u4f9b\u58c1\u9762\u9644\u8fd1\u7684\u96e2\u5b50\u4fe1\u606f\uff0c\u4f46\u7121\u6cd5\u53cd\u6620\u9ad4\u76f8\u96fb\u6f3f\u7684\u5206\u4f48\u3002\u2217\u2217\u5efa\u8b70\u7684\u5be6\u969b\u64cd\u4f5c\u6b65\u9a5f\uff1a\u2217\u22171.\u2217\u2217\u521d\u6b65\u63a2\u6e2c(OES):\u2217\u2217\u9996\u5148\u4f7f\u7528OES\u901a\u904e\u73fe\u6709\u8996\u7a97\u9032\u884c\u521d\u6b65\u7684\u5149\u8b5c\u5206\u6790\uff0c\u78ba\u8a8dAr^+$\u548cO$_2^+\u7684\u767c\u5c04\u8b5c\u7dda\uff0c\u4e26\u5617\u8a66\u901a\u904e\u7c21\u55ae\u7684\u7a7a\u9593\u6383\u63cf\uff08\u5982\u679c\u53ef\u80fd\uff09\u7372\u53d6\u767c\u5c04\u5f37\u5ea6\u7684\u7c97\u7565\u5206\u4f48\uff0c\u4e86\u89e3\u96e2\u5b50\u7684\u76f8\u5c0d\u8c50\u5ea6\u548c\u5927\u81f4\u5206\u4f48\u7bc4\u570d\u30022.\u2217\u2217\u8003\u616e\u975e\u7834\u58de\u6027\u65b9\u6cd5\u512a\u5148\uff1a\u2217\u2217\u9451\u65bc\u9776\u6750\u5c3a\u5bf8\u548c\u6c89\u7a4d\u554f\u984c\uff0c\u512a\u5148\u8003\u616e\u975e\u7834\u58de\u6027\u65b9\u6cd5\u3002\u2217\u2217\u2217\u82e5\u9810\u7b97\u548c\u6280\u8853\u5141\u8a31\uff1a\u2217\u2217\u8a55\u4f30LIF\u7684\u53ef\u884c\u6027\u3002\u7814\u7a76Ar^+$\u548cO$_2^+\u662f\u5426\u5b58\u5728\u9069\u5408\u7528\u96f7\u5c04\u6fc0\u767c\u7684\u8e8d\u9077\uff0c\u4ee5\u53ca\u96f7\u5c04\u8a2d\u5099\u7684\u53ef\u7528\u6027\u3002\u8a55\u4f30\u8154\u9ad4\u958b\u8996\u7a97\u7684\u53ef\u80fd\u6027\u548c\u4f4d\u7f6e\uff0c\u4ee5\u5be6\u73fe\u5fc5\u8981\u7684\u96f7\u5c04\u5c0e\u5165\u548c\u87a2\u5149\u6536\u96c6\u5149\u8def\u3002LIF\u662f\u7372\u5f97\u6e96\u78ba\u6eab\u5ea6\u548c\u7a7a\u9593\u5206\u4f48\u7684\u6700\u4f73\u9014\u5f91\u3002\u2217\u2217\u2217\u82e5\u9810\u7b97\u6709\u9650\u6216LIF\u96e3\u5ea6\u904e\u9ad8\uff1a\u2217\u2217\u8003\u616e\u5b89\u88dd\u8154\u58c1\u53d6\u6a23\u8cea\u8b5c\u5100\u3002\u5728\u5e7e\u500b\u95dc\u9375\u7684\u58c1\u9762\u4f4d\u7f6e\u958b\u53d6\u6a23\u53e3\uff08\u4f8b\u5982\u9776\u6750\u5c0d\u9762\u3001\u5074\u9762\u7b49\uff09\uff0c\u91cf\u6e2c\u5230\u9054\u58c1\u9762\u7684\u96e2\u5b50\u80fd\u91cf\u5206\u4f48\u3002\u9019\u4e0d\u80fd\u63d0\u4f9b\u9ad4\u76f8\u5206\u4f48\uff0c\u4f46\u80fd\u63d0\u4f9b\u58c1\u9762\u9644\u8fd1\u7684\u96e2\u5b50\u80fd\u91cf\u4fe1\u606f\uff0c\u5c0d\u4e86\u89e3\u96e2\u5b50\u5c0d\u57fa\u677f\u6216\u8154\u58c1\u7684\u8f5f\u64ca\u884c\u70ba\u6709\u5e6b\u52a9\u30023.\u2217\u2217\u8003\u616e\u6709\u9650\u7684\u7834\u58de\u6027\u91cf\u6e2c(\u5982\u679c\u5fc5\u8981)\uff1a\u2217\u2217\u5982\u679c\u58c1\u9762\u53d6\u6a23\u8cea\u8b5c\u5100\u7684\u4fe1\u606f\u4e0d\u8db3\uff0c\u4e14LIF\u7121\u6cd5\u5be6\u73fe\uff0c\u53ef\u4ee5\u8003\u616e\u5728\u8154\u9ad4\u908a\u7de3\u6216\u96e2\u9776\u6750\u8f03\u9060\u3001\u5c0d\u96fb\u6f3f\u64fe\u52d5\u76f8\u5c0d\u8f03\u5c0f\u7684\u5340\u57df\uff0c\u901a\u904e\u73fe\u6709\u6216\u65b0\u589e\u7684\u771f\u7a7a\u6cd5\u862d\u5f15\u5165\u63a2\u91dd\u5f0f\u96e2\u5b50\u80fd\u91cf\u5206\u6790\u5100\u6216\u7d50\u5408\u8cea\u8b5c\u5100\u7684\u63a2\u91dd\uff0c\u9032\u884c\u5e7e\u500b\u9ede\u7684\u91cf\u6e2c\u3002\u9019\u7121\u6cd5\u63d0\u4f9b\u5168\u9762\u7684\u7a7a\u9593\u5206\u4f48\uff0c\u4f46\u80fd\u7372\u53d6\u7279\u5b9a\u9ede\u7684\u96e2\u5b50\u80fd\u91cf\u4fe1\u606f\u3002\u9700\u8981\u8003\u616e\u63a2\u91dd\u7684\u4fdd\u8b77\u548c\u6e05\u6f54\u6a5f\u5236\u3002\u7e3d\u4e4b\uff0c\u5728\u9019\u500b\u7279\u5b9a\u7684\u78c1\u63a7\u6ffa\u5c04\u8154\u9ad4\u4e2d\uff0c\u7372\u5f97\u8a73\u7d30\u7684Ar^+$\u548cO$_2^+$\u96e2\u5b50\u6eab\u5ea6\u548c\u7a7a\u9593\u5206\u4f48\u4fe1\u606f\u662f\u4e00\u500b\u8907\u96dc\u7684\u4efb\u52d9\u3002\u6700\u7406\u60f3\u4e14\u4fe1\u606f\u6700\u8c50\u5bcc\u7684\u65b9\u6cd5\u662fLIF\uff0c\u4f46\u6210\u672c\u548c\u6280\u8853\u8981\u6c42\u5f88\u9ad8\u3002\u9000\u800c\u6c42\u5176\u6b21\u53ef\u4ee5\u8003\u616e\u7d50\u5408\u58c1\u9762\u53d6\u6a23\u8cea\u8b5c\u5100\u548c\u6709\u9650\u9ede\u7684\u63a2\u91dd\u91cf\u6e2c\uff0c\u6216\u8005\u50c5\u5229\u7528OES\u7372\u53d6\u5b9a\u6027\u5206\u4f48\u548c\u5617\u8a66\u4f30\u7b97\u6eab\u5ea6\uff08\u6e96\u78ba\u6027\u5f85\u9a57\u8b49\uff09\u3002\u5728\u5be6\u65bd\u4efb\u4f55\u65b9\u6cd5\u4e4b\u524d\uff0c\u90fd\u5fc5\u9808\u4ed4\u7d30\u8a55\u4f30\u5c0d\u8154\u9ad4\u7d50\u69cb\u7684\u5f71\u97ff\u3001\u6c89\u7a4d\u6c61\u67d3\u554f\u984c\u3001\u4ee5\u53ca\u8a2d\u5099\u8207\u8108\u885d\u96fb\u6e90\u7684\u540c\u6b65\u9700\u6c42\u3002<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u601d\u8def\u908f\u8f2f\u5206\u6790<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u4ee5\u4e0b\u662f\u751f\u6210 OES \u548c LIF \u539f\u5247\u8a73\u7d30\u8aaa\u660e\u7684\u601d\u8003\u904e\u7a0b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u77ad\u89e3\u8acb\u6c42\uff1a<\/strong> \u4f7f\u7528\u8005\u5e0c\u671b\u8a73\u7d30\u77ad\u89e3\u76f4\u8b80\u5149\u8b5c \uff08OES\uff09 \u548c\u6fc0\u5149\u8a98\u5c0e\u87a2\u5149 \uff08LIF\uff09 \u80cc\u5f8c\u7684\u539f\u7406\uff0c\u7279\u5225\u662f\u5728\u7b49\u96e2\u5b50\u9ad4\u8a3a\u65b7\u7684\u80cc\u666f\u4e0b\u3002\u89e3\u91cb\u61c9\u6db5\u84cb\u5b83\u5011\u7684\u5de5\u4f5c\u539f\u7406\u548c\u6e2c\u91cf\u5167\u5bb9\uff0c\u5c0d\u6bd4\u5b83\u5011\u7684\u80fd\u529b\uff0c\u7279\u5225\u662f\u96e2\u5b50\u7279\u6027\uff08\u5118\u7ba1\u4e00\u822c\u539f\u5247\u4e5f\u9069\u7528\u65bc\u4e2d\u6027\uff09\u3002<\/li>\n\n\n\n<li><strong>\u89e3\u69cb\u8acb\u6c42\uff1a<\/strong><ul><li>\u89e3\u91cb OES \u539f\u7406\u3002<\/li><\/ul><ul><li>\u89e3\u91cb LIF \u539f\u7406\u3002<\/li><\/ul><ul><li>\u89e3\u91cb\u5b83\u5011\u5982\u4f55\u7528\u65bc\u96fb\u6f3f\u8a3a\u65b7\u3002<\/li><\/ul><ul><li>\u7a81\u51fa\u986f\u793a\u5b83\u5011\u8207\u6e2c\u91cf\u7269\u8cea \uff08\u96e2\u5b50\uff09\u3001\u6eab\u5ea6\u548c\u5206\u4f48\u7684\u76f8\u95dc\u6027\uff08\u96b1\u5f0f\u9023\u7d50\u56de\u4e0a\u4e00\u500b\u67e5\u8a62\uff09\u3002<\/li><\/ul>\n<ul class=\"wp-block-list\">\n<li>\u4f7f\u7528\u6e05\u6670\u7684\u8a9e\u8a00\u548c\u53ef\u80fd\u7684\u5716\u8868\uff08\u6982\u5ff5\u6027\u63cf\u8ff0\uff0c\u56e0\u70ba\u6211\u4e0d\u6703\u756b\uff09\u3002<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>\u898f\u5283\u7d50\u69cb\uff1a<\/strong><ul><li>\u7c21\u4ecb\uff1a\u7c21\u8981\u8aaa\u660e\u5169\u8005\u90fd\u662f\u96fb\u6f3f\u8a3a\u65b7\u4e2d\u4f7f\u7528\u7684\u5149\u5b78\u65b9\u6cd5\u3002<\/li><\/ul><ul><li><strong>\u76f4\u8b80\u5149\u8b5c <\/strong><strong>\uff08OES<\/strong><strong>\uff09\uff1a<\/strong><ul><li>\u6838\u5fc3\u539f\u7406\uff1a\u7b49\u96e2\u5b50\u9ad4\u767c\u5149\u3002\u70ba\u4ec0\u9ebc\uff1f\u96fb\u5b50\u78b0\u649e\u6fc0\u767c\uff0c\u8f3b\u5c04\u8870\u8b8a\u3002<\/li><\/ul><ul><li>\u6e2c\u91cf\u5167\u5bb9\uff1a\u767c\u5c04\u5149\u5b50\u7684\u6ce2\u9577\u548c\u5f37\u5ea6\u3002<\/li><\/ul><ul><li>\u7372\u5f97\u54ea\u4e9b\u8cc7\u8a0a\uff1a<ul><li>\u7269\u8cea\u9452\u5b9a\uff08\u5c07\u6ce2\u9577\u8207\u5df2\u77e5\u7684\u539f\u5b50\/\u5206\u5b50\u5149\u8b5c\u9032\u884c\u6bd4\u8f03\uff09\u3002<\/li><\/ul><ul><li>\u76f8\u5c0d\u7269\u7a2e\u8c50\u5ea6\uff08\u6bd4\u8f03\u7dda\u5f37\u5ea6 &#8211; <em>\u6ce8\u610f\uff1a\u8207\u5bc6\u5ea6\u4e0d\u662f\u7dda\u6027\u76f8\u95dc<\/em>\uff09\u3002<\/li><\/ul><ul><li>\u6fc0\u767c\u6eab\u5ea6\uff08\u4f86\u81ea\u540c\u4e00\u7269\u7a2e\u7684\u4e0d\u540c\u8b5c\u7cfb\u7684\u5f37\u5ea6\u6bd4 \u00a0&#8211; <em>\u6ce8\u610f\uff1a\u901a\u5e38\u4e0d\u662f\u771f\u6b63\u7684\u71b1\u5e73\u8861<\/em>\uff09\u3002<\/li><\/ul><ul><li>\u591a\u666e\u52d2\u5c55\u5bec\uff08\u5c0d\u65bc <em>\u6eab\u5ea6<\/em> \u6216\u901f\u5ea6\u5206\u4f48 &#8211; \u89e3\u91cb\u6548\u679c\u53ca\u5176\u4f7f\u7528\u65b9\u6cd5\uff0c\u63d0\u53ca\u96e2\u5b50\u7684\u9650\u5236\uff09\u3002<\/li><\/ul><ul><li>\u7a7a\u9593\u5206\u4f48\uff08\u4f7f\u7528\u7a7a\u9593\u89e3\u6790\u5ea6\u6280\u8853\uff09\u3002<\/li><\/ul><\/li><\/ul><ul><li>\u8a2d\u7f6e\uff1a\u7b49\u96e2\u5b50\u9ad4\u6e90 -> \u6536\u96c6\u5149\u5b78\u5143\u4ef6 -> \u5149\u8b5c\u5100 -> \u63a2\u6e2c\u5668\u3002<\/li><\/ul><ul><li>\u7e3d\u7d50\u8981\u9ede\uff08\u96fb\u6f3f\u8a3a\u65b7\u7684\u512a\u9ede\/\u7f3a\u9ede\uff09\u3002<\/li><\/ul><\/li><\/ul><ul><li><strong>\u6fc0\u5149\u8a98\u5c0e\u87a2\u5149 <\/strong><strong>\uff08LIF<\/strong><strong>\uff09\uff1a<\/strong><ul><li>\u6838\u5fc3\u539f\u7406\uff1a\u4f7f\u7528\u6fc0\u5149 <em>\u4e3b\u52d5<\/em> \u6fc0\u767c\u7279\u5b9a\u8e8d\u9077\uff0c\u7136\u5f8c\u6aa2\u6e2c\u96a8\u5f8c\u7684\u87a2\u5149\u3002<\/li><\/ul><ul><li>\u70ba\u4ec0\u9ebc\u4f7f\u7528\u9433\u5c04\uff1f\u5c0d\u8208\u596e\u7684\u7279\u7570\u6027\u548c\u63a7\u5236\u3002<\/li><\/ul><ul><li>\u904e\u7a0b\uff1a<ul><li>\u5438\u6536\uff1a\u8abf\u8ae7\u5230\u76ee\u6a19\u7269\u8cea\u7684\u7279\u5b9a\u5438\u6536\u7dda\u7684\u53ef\u8abf\u8ae7\u9433\u5c04\u3002<\/li><\/ul><ul><li>\u6fc0\u767c\uff1a\u7269\u8cea\u5438\u6536\u5149\u5b50\u4e26\u9032\u5165\u66f4\u9ad8\u7684\u80fd\u91cf\u72c0\u614b\u3002<\/li><\/ul><ul><li>\u87a2\u5149\uff1a\u6fc0\u767c\u7684\u7269\u8cea\u8870\u8b8a\uff0c\u767c\u5c04\u5149\u5b50\uff08\u901a\u5e38\u8207\u539f\u59cb\u72c0\u614b\u4e0d\u540c\uff09\u3002<\/li><\/ul><ul><li>\u6aa2\u6e2c\uff1a\u6536\u96c6\u548c\u6aa2\u6e2c\u87a2\u5149\u5149\u5b50\uff08\u901a\u5e38\u8207\u9433\u5c04\u7684\u6ce2\u9577\u4e0d\u540c\uff0c\u4ee5\u6e1b\u5c11\u6563\u5c04\u96dc\u8a0a\uff09\u3002<\/li><\/ul><\/li><\/ul><ul><li>\u7372\u5f97\u54ea\u4e9b\u8cc7\u8a0a\uff1a<ul><li>\u7269\u8cea\u9452\u5b9a\uff08\u901a\u904e\u627e\u5230\u8ae7\u632f\u5438\u6536\u6ce2\u9577\uff09\u3002<\/li><\/ul><ul><li><em>\u7d55\u5c0d<\/em> \u6216 <em>\u76f8\u5c0d<\/em> \u5bc6\u5ea6\uff08\u7a4d\u5206\u87a2\u5149\u5f37\u5ea6\uff09\u3002<\/li><\/ul><ul><li><em>\u901f\u5ea6\u5206\u4f48\u51fd\u6578 <\/em><em>\uff08VDF<\/em><em>\uff09 \/ <\/em><em>\u6eab\u5ea6<\/em>\uff1a\u901a\u904e\u6383\u63cf\u5438\u6536\u7dda\u4e0a\u7684\u6fc0\u5149\u983b\u7387\u4e26\u6e2c\u91cf\u87a2\u5149\u5f37\u5ea6\u5206\u4f48\u3002\u8f2a\u5ed3\u7684\u5bec\u5ea6\u7531\u975e\u78b0\u649e\u6216\u5f31\u78b0\u649e\u72c0\u614b\u7684\u591a\u666e\u52d2\u6548\u61c9\u6c7a\u5b9a\uff0c\u76f4\u63a5\u7d66\u51fa VDF\uff0c\u5f9e\u800c\u7d66\u51fa\u9433\u5c04\u675f\u65b9\u5411\u7684\u6eab\u5ea6\u3002<\/li><\/ul><ul><li>\u7a7a\u9593\u5206\u4f48\uff1a\u901a\u904e\u805a\u7126\u9433\u5c04\u5668\u548c\/\u6216\u5f9e\u7279\u5b9a\u9ad4\u7a4d\u6536\u96c6\u87a2\u5149\uff0c\u4e26\u6383\u63cf\u8a72\u9ad4\u7a4d\u3002<\/li><\/ul><ul><li>\u6d41\u901f\uff08\u7dda\u8def\u4e2d\u5fc3\u7684\u591a\u666e\u52d2\u983b\u79fb\uff09\u3002<\/li><\/ul><\/li><\/ul><ul><li>\u8a2d\u7f6e\uff1a\u9433\u5c04 -> \u5149\u675f\u50b3\u8f38\u5149\u5b78\u5668\u4ef6 -> \u7b49\u96e2\u5b50\u9ad4 -> \u6536\u96c6\u5149\u5b78\u5668\u4ef6 ->\u5149\u8b5c\u5100\/\u6aa2\u6e2c\u5668 -> \u4fe1\u865f\u8655\u7406\u3002<\/li><\/ul><ul><li>\u7e3d\u7d50\u8981\u9ede\uff08\u96fb\u6f3f\u8a3a\u65b7\u7684\u512a\u9ede\/\u7f3a\u9ede\uff09\u3002<\/li><\/ul><\/li><\/ul><ul><li><strong>\u6bd4\u8f03\/<\/strong><strong>\u95dc\u4fc2\uff1a<\/strong> \u5b83\u5011\u5982\u4f55\u4e92\u88dc\uff1fOES \u7528\u65bc\u6982\u89bd\/\u8f15\u9b06\u76e3\u63a7;LIF \u7528\u65bc\u7cbe\u78ba\u7684\u3001\u7279\u5b9a\u65bc\u7269\u7a2e\u7684\u3001\u7a7a\u9593\u5206\u8fa8\u7684 VDF\/\u6eab\u5ea6\/\u5bc6\u5ea6\u3002<\/li><\/ul>\n<ul class=\"wp-block-list\">\n<li><strong>\u8207\u6ffa\u5c04\u4e2d Ar+ <\/strong><strong>\u548c O2+ <\/strong><strong>\u7684\u76f8\u95dc\u6027\uff1a<\/strong> \u7c21\u8981\u4ecb\u7d39\u9019\u4e9b\u65b9\u6cd5\u5982\u4f55\u61c9\u7528\u65bc\u4f7f\u7528\u8005\u7684\u7279\u5b9a\u96e2\u5b50\uff0c\u91cd\u7533\u6311\u6230\uff08\u96e2\u5b50\u6eab\u5ea6\u7684 OES\u3001O2+ \u8907\u96dc\u6027\u7684 LIF\u3001\u5149\u5b78\u8a2a\u554f\u3001\u6ffa\u5c04\u6c89\u7a4d\uff09\u3002<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>\u8d77\u8349\u89e3\u91cb\uff08\u53cd\u8986\u904b\u7b97\u904e\u7a0b\uff09\uff1a<\/strong><ul><li><em>OES<\/em><em>\uff1a<\/em> \u5f9e\u57fa\u672c\u6982\u5ff5\u958b\u59cb &#8211; \u7b49\u96e2\u5b50\u9ad4\u767c\u5149\u3002\u70ba\u4ec0\u9ebc\uff1f\u96fb\u5b50\u78b0\u649e\u6fc0\u767c\u539f\u5b50\/\u5206\u5b50\/\u96e2\u5b50\u3002\u5b83\u5011\u901a\u904e\u767c\u5149\u4f86\u53bb\u6fc0\u767c\u3002\u6bcf\u500b\u7269\u7a2e\u90fd\u6709\u7368\u7279\u7684\u6ce2\u9577\u300c\u6307\u7d0b\u300d\u3002\u5f37\u5ea6\u53d6\u6c7a\u65bc\u5bc6\u5ea6\u3001\u96fb\u5b50\u80fd\u91cf\u3001\u8e8d\u9077\u6982\u7387\u3002\u5982\u4f55\u7372\u53d6\u6eab\u5ea6\uff1f\u591a\u666e\u52d2\u5c55\u5bec &#8211; \u89e3\u91cb\u9019\u500b\u60f3\u6cd5\uff08\u79fb\u52d5\u767c\u5c04\u5668\u6703\u6539\u8b8a\u983b\u7387\uff09\u3002\u63d0\u5230\u5b83\u66f4\u96e3\u8655\u7406\u96e2\u5b50\uff0c\u800c\u4e14\u901a\u5e38\u4e0d\u5982 LIF \u7cbe\u78ba\u3002\u63d0\u53ca\u7a7a\u9593\u89e3\u6790\u5ea6\u662f\u53ef\u80fd\u7684\uff0c\u4f46\u901a\u5e38\u662f\u7dda\u96c6\u6210\u7684\u3002<\/li><\/ul><ul><li><em>LIF<\/em><em>\uff1a<\/em> \u9996\u5148\u9700\u8981\u6bd4 OES \u66f4\u5177\u9ad4\u7684\u8cc7\u8a0a\u3002OES \u770b\u5230\u4e86\u5df2\u7d93\u8208\u596e\u7684\u6771\u897f;LIF <em>\u8b93<\/em> \u4e00\u4e9b\u6771\u897f\u8b8a\u5f97\u8208\u596e\u3002\u4f7f\u7528\u9433\u5c04\uff0c\u56e0\u70ba\u5b83\u662f\u55ae\u8272\u4e14\u53ef\u8abf\u8ae7\u7684\u3002\u89e3\u91cb\u5438\u6536\u87a2\u5149\u904e\u7a0b\u3002\u5f37\u8abf\u60a8 <em>\u6383\u63cf<\/em> \u7684\u6fc0\u5149\u983b\u7387\u3002\u70ba\u4ec0\u9ebc\u8981\u6383\u63cf\uff1f\u56e0\u70ba\u671d\u5411\/\u9060\u96e2\u9433\u5c04\u7684\u539f\u5b50\u5438\u6536\u7684\u983b\u7387\u7565\u6709\u4e0d\u540c\uff08\u591a\u666e\u52d2\u6548\u61c9\uff09\u3002\u6383\u63cf\u6642\u5438\u6536\u66f2\u7dda\u7684\u5f62\u72c0\u662f VDF\u3002VDF \u7d66\u51fa\u6eab\u5ea6\u3002\u5f37\u8abf\u7269\u7a2e\u7279\u7570\u6027\u548c\u7a7a\u9593\u89e3\u6790\u5ea6\u80fd\u529b\u3002\u63d0\u5230\u5b83\u66f4\u8907\u96dc\u3001\u66f4\u6602\u8cb4\u3002<\/li><\/ul>\n<ul class=\"wp-block-list\">\n<li><em>\u6539\u9032\u8a9e\u8a00\uff1a<\/em> \u4f7f\u7528\u201c\u8f3b\u5c04\u8870\u8b8a\u201d\u3001\u201c\u96fb\u5b50\u78b0\u649e\u6fc0\u767c\u201d\u3001\u201c\u5149\u8b5c\u7dda\u201d\u3001\u201c\u591a\u666e\u52d2\u5c55\u5bec\u201d\u3001\u201c\u901f\u5ea6\u5206\u4f48\u51fd\u6578 \uff08VDF\uff09\u201d\u3001\u201c\u53ef\u8abf\u8ae7\u9433\u5c04\u201d\u3001\u201c\u87a2\u5149\u201d\u7b49\u8853\u8a9e\u3002\u89e3\u91cb <em>\u70ba\u4ec0\u9ebc<\/em> \u4e00\u500b\u4eba\u53ef\u80fd\u6703\u4f7f\u7528\u4e00\u500b\u800c\u4e0d\u662f\u53e6\u4e00\u500b\u3002\u4f7f\u7528 LaTeX \u4f5c\u70ba\u96e2\u5b50\u540d\u7a31 \uff08Ar$^+$\uff0c O$_2^+\uff09\u3002\u78ba\u4fdd\u4ed6\u5011\u76f4\u63a5\u2217\u2217\u6e2c\u91cf\u548c\u4ed6\u5011\u2217\u63a8\u65b7\u2217\u4e4b\u9593\u7684\u5340\u5225\u662f\u660e\u78ba\u7684\uff08OES\u6e2c\u91cf\u767c\u5c04\u5149\u5f37\u5ea6\/\u6ce2\u9577\uff0c\u63a8\u65b7\u5bc6\u5ea6\/\u6eab\u5ea6;LIF\u6e2c\u91cf\u87a2\u5149\u8207\u6fc0\u5149\u983b\u7387\uff0c\u76f4\u63a5\u6e2c\u91cfVDF \/\u6eab\u5ea6\uff09.\u2217\u2217AddDiagrams\uff08Conceptual\uff09\uff1a\u2217Describethesetupforeachmethod.ForOES\uff1alightcollectedfromplasma\u2212>intoesspectrometer.\u5c0d\u65bcLIF\uff1a\u9433\u5c04\u675f\u9032\u5165\u7b49\u96e2\u5b50\u9ad4+\u5149\u6536\u96c6\u2217\u5f9e\u4e0d\u540c\u7684\u89d2\u5ea6\/\u4f4d\u7f6e\u2217\u2212>\u9032\u5165\u63a2\u6e2c\u5668\/\u5149\u8b5c\u5100\u3002\u9019\u6709\u52a9\u65bc\u53ef\u8996\u5316\u5dee\u7570\uff08\u88ab\u52d5vs.\u4e3b\u52d5\uff0c\u9ad4\u7a4d\u9078\u64c7\uff09.\u2217\u2217Connectback\uff1a\u2217\u7c21\u55ae\u5730\u91cd\u7533\uff0c\u5c0d\u65bcAr^+$ \u548c O$_2^+$ \u6eab\u5ea6\/\u5206\u4f48\uff0cLIF \u901a\u5e38\u662f\u6e96\u78ba\u6027\u7684\u9996\u9078\uff0c\u4f46 OES \u5c0d\u65bc\u7be9\u9078\u548c\u76f8\u5c0d\u5206\u4f48\u5f88\u6709\u7528\u3002<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>\u6700\u7d42\u5be9\u6838\uff1a<\/strong>\u6839\u64da\u4f7f\u7528\u8005\u7684\u8acb\u6c42\u6aa2\u67e5\u6e05\u6670\u5ea6\u3001\u6e96\u78ba\u6027\u3001\u908f\u8f2f\u6d41\u7a0b\u548c\u5b8c\u6574\u6027\u3002\u78ba\u4fdd\u5169\u7a2e\u65b9\u6cd5\u4e4b\u9593\u7684\u5340\u5225\u6e05\u6670\u3002\u78ba\u4fdd\u6e05\u695a\u5730\u89e3\u91cb\u4e86\u5982\u4f55\u5f9e<em>\u6bcf\u7a2e<\/em>\u65b9\u6cd5\u7372\u5f97\u6eab\u5ea6\uff08\u5169\u7a2e\u65b9\u6cd5\u7684\u591a\u666e\u52d2\u5c55\u5bec\uff0c\u4f46\u7372\u5f97\u8f2a\u5ed3\u7684\u6a5f\u5236\u660e\u986f\u4e0d\u540c &#8211; \u88ab\u52d5\u767c\u5c04\u8207\u4e3b\u52d5\u6fc0\u5149\u6383\u63cf\uff09\u3002\u78ba\u4fdd\u6b63\u78ba\u4f7f\u7528\u8853\u8a9e\u3002<\/li>\n<\/ul>\n","protected":false},"excerpt":{"rendered":"<p>\u5be6\u9a57\u6a21\u578b\u7684\u5efa\u7acb\u8207\u96fb\u6f3f\u6eab\u5ea6\u91cf\u6e2c\u65b9\u6cd5\u7684\u63a2\u8a0e \u6b50\u7279\u5a01\u79d1\u6280\u80a1\u4efd\u6709\u9650\u516c\u53f8\u6e5b\u672c\u5cb1 2025.4.28 \u6a21\u578b\u6709\u4e00\u500b\u771f\u7a7a\u88fd\u7a0b\u8154\u9ad4\u5b89\u88dd\u4e86\u771f\u7a7a\u62bd\u6c23\u5e6b\u6d66\u7d44\u5408(mechanical pump+roots pump+turbo molecular pump)\u6301\u7e8c\u904b\u8f49\u4e0b\u7dad\u6301\u58d3\u529b\u57283 mtoor\uff0c\u540c\u6642\u4f7f\u7528\u5169\u652f\u8cea\u6d41\u91cf\u8a08(mass flow controller)\u500b\u5225\u5c0e\u5165\u80cc\u666f\u6c23\u9ad4Ar (100 sccm)\u8207\u53cd\u61c9\u6027\u6c23\u9ad4O2 (10 sccm)\uff0c\u5728\u771f\u7a7a\u8154\u9ad4\u5074\u9762\u5668\u58c1\u5167\u5074\u5b89\u88dd\u4e86\u4e00\u652f\u78c1\u63a7\u6ffa\u5c04\u9776\u5ea7\uff0c\u9776\u5ea7\u4e0a\u5b89\u88dd\u4e86\u4e00\u584a\u6c34\u51b7\u7684\u9776\u6750(\u5c3a\u5bf8LxWxD: 800mm x 125mm x 5mm)\uff0c\u9776\u5ea7\u80cc\u9762\u9396\u6b7b\u5728\u8154\u9ad4\u7684\u5167\u5074\uff0c\u4e26\u63a1\u7528\u9ad8\u771f\u7a7a\u7528\u7684O\u74b0 (O-ring)\u5c0d\u9ad8\u58d3\u96fb\u6975\u5c0e\u5165(feedthrough)\u505a\u9ad8\u771f\u7a7a\u7684\u6c23\u5bc6(\u6d29\u6f0f\u7387\u5c0f\u65bc2E-9 torr)\uff0c\u9ad8\u58d3\u96fb\u6975\u5c0e\u5165\u5728\u5927\u6c23\u58d3\u529b\u5074\uff0c\u6b63\u6975\u8207\u8ca0\u6975\u5206\u5225\u63a5\u4e0a\u8108\u885d\u96fb\u6e90\u4f9b\u61c9\u5668\u7684\u6b63\u6975\u8f38\u51fa\u8207\u8ca0\u6975\u8f38\u51fa\uff0c\u9019\u7d44\u8108\u885d\u96fb\u6e90\u4f9b\u61c9\u5668\u53ef\u4ee5\u63d0\u4f9b800V\uff0c35A\u7684\u96fb\u529b\uff0c\u5728\u78c1\u63a7\u628a\u8868\u9762\u7522\u751f\u96fb\u6f3f\u3002\u96fb\u6f3f\u88e1\u9762\u7684\u7d44\u6210\u5143\u7d20\u6709Ar\u8207O2\u3002\u60f3\u8981\u91cf\u6e2c\u78c1\u63a7\u6ffa\u5c04\u9776\u8868\u9762\u7684Ar, O2\u7684\u96e2\u5b50\u6eab\u5ea6\u8207\u5206\u5e03\uff0c\u8acb\u5206\u6790\u4e26\u63d0\u4f9b\u4f7f\u7528\u7834\u58de\u6027\u91cf\u6e2c(destructive measurement)\u8207\u975e\u7834\u58de\u6027\u91cf\u6e2c(non-destructive measurement)\u9019\u5169\u7a2e\u91cf\u6e2c\u65b9\u6cd5\u7684\u5404\u7a2e\u53ef\u80fd\u4f5c\u6cd5\u3002 \u601d\u8def\u908f\u8f2f\u5206\u6790\u91dd\u5c0d\u9019\u500b\u7279\u5b9a\u7684\u78c1\u63a7\u6ffa\u5c04\u8154\u9ad4\u88fd\u7a0b\u74b0\u5883\u4e0b\uff0c\u91cf\u6e2cAr$^+$\u548cO$_2^+\u96e2\u5b50\u7684\u6eab\u5ea6\u8207\u5206\u4f48\uff0c\u8003\u91cf\u5230\u8154\u9ad4\u7d50\u69cb\u3001\u6c23\u9ad4\u7a2e\u985e\u3001\u4ee5\u53ca\u9776\u6750\u5c3a\u5bf8\u7b49\u56e0\u7d20\uff0c\u4ee5\u4e0b\u5206\u6790\u7834\u58de\u6027\u8207\u975e\u7834\u58de\u6027\u91cf\u6e2c\u65b9\u6cd5\u7684\u53ef\u80fd\u4f5c\u6cd5\u3001\u512a\u7f3a\u9ede\u8207\u5be6\u65bd\u4e0a\u7684\u6311\u6230\u3002\u2217\u2217\u91cd\u8981\u8003\u91cf\u56e0\u7d20\uff1a\u2217\u22171.\u2217\u2217\u78c1\u63a7\u6ffa\u5c04\u96fb\u6f3f\u7279\u6027\uff1a\u2217\u2217\u96fb\u6f3f\u5bc6\u5ea6\u9ad8\u3001\u975e\u5747\u52fb\u6027\u5f37\uff0c\u7279\u5225\u662f\u5728\u9776\u6750\u8868\u9762\u9644\u8fd1\u6709\u5f37\u70c8\u7684\u78c1\u5834\u68af\u5ea6\u30022.\u2217\u2217\u9776\u6750\u5c3a\u5bf8\u8207\u4f4d\u7f6e\uff1a\u2217\u2217800mmx125mm\u7684\u5927\u5c3a\u5bf8\u9776\u6750\u56fa\u5b9a\u5728\u8154\u58c1\uff0c\u9650\u5236\u4e86\u8154\u5167\u53ef\u7528\u7684\u7a7a\u9593\uff0c\u4e5f\u4f7f\u5f97\u63a2\u91dd\u6216\u5149\u5b78\u8def\u5f91\u7684\u9032\u5165\u548c\u6383\u63cf\u8b8a\u5f97\u56f0\u96e3\u30023.\u2217\u2217\u53cd\u61c9\u6027\u6c23\u9ad4(O2)\uff1a\u2217\u2217O2\u96fb\u6f3f\u5177\u6709\u6c27\u5316\u6027\uff0c\u53ef\u80fd\u5c0d\u63a2\u91dd\u6216\u5149\u5b78\u8996\u7a97\u9020\u6210\u8150\u8755\u6216\u6c61\u67d3\u30024.\u2217\u2217\u4f4e\u6c23\u58d3(3mTorr)\uff1a\u2217\u2217\u96d6\u7136\u662f\u4f4e\u6c23\u58d3\uff0c\u4f46\u5c0d\u65bc\u96e2\u5b50\u800c\u8a00\u4ecd\u662f\u78b0\u649e\u6027\u74b0\u5883\uff0c\u96e2\u5b50\u80fd\u91cf\u5206\u4f48\u6703\u53d7\u78b0\u649e\u5f71\u97ff\u30025.\u2217\u2217\u8108\u885d\u96fb\u6e90\uff1a\u2217\u2217\u96fb\u6f3f\u53c3\u6578\uff08\u5305\u62ec\u96e2\u5b50\u80fd\u91cf\u5206\u4f48\uff09\u53ef\u80fd\u96a8\u8108\u885d\u8b8a\u5316\uff0c\u9700\u8981\u5177\u5099\u6642\u9593\u89e3\u6790\u5ea6\u7684\u91cf\u6e2c\u80fd\u529b\u3002\u2217\u2217\u91cf\u6e2c\u65b9\u6cd5\u5206\u6790\uff1a\u2217\u2217\u2217\u2217A.\u7834\u58de\u6027\u91cf\u6e2c(DestructiveMeasurement)\u2217\u2217\u9019\u985e\u65b9\u6cd5\u9700\u8981\u5c07\u91cf\u6e2c\u88dd\u7f6e\u63d2\u5165\u5230\u96fb\u6f3f\u4e2d\uff0c\u6703\u5c0d\u96fb\u6f3f\u72c0\u614b\u7522\u751f\u4e00\u5b9a\u7a0b\u5ea6\u7684\u64fe\u52d5\uff0c\u4e14\u88dd\u7f6e\u8868\u9762\u5bb9\u6613\u53d7\u5230\u6ffa\u5c04\u6c89\u7a4d\u7269\u7684\u6c61\u67d3\u30021.\u2217\u2217\u63a2\u91dd\u5f0f\u96e2\u5b50\u80fd\u91cf\u5206\u6790\u5100(Probe\u2212basedRetardingFieldEnergyAnalyzer,RFEA)\u6216\u7d50\u5408\u8cea\u8b5c\u5100\u7684\u63a2\u91dd(Probe\u2212basedMassSpectrometer\/EnergyAnalyzer):\u2217\u2217\u2217\u2217\u2217\u4f5c\u6cd5\uff1a\u2217\u2217\u2217\u5c07\u4e00\u500b\u5e36\u6709\u5c0f\u5b54\uff08\u6216\u591a\u500b\u5c0f\u5b54\uff09\u7684\u63a2\u91dd\u982d\u63d2\u5165\u5230\u96fb\u6f3f\u4e2d\u3002\u63a2\u91dd\u5167\u90e8\u901a\u5e38\u5305\u542b\u591a\u500b\u67f5\u6975\u96fb\u6975\uff0c\u7528\u65bc\u904e\u6ffe\u96fb\u5b50\u4e26\u5c0d\u96e2\u5b50\u65bd\u52a0\u53cd\u5411\u504f\u58d3\uff0c\u5206\u6790\u4e0d\u540c\u80fd\u91cf\u7684\u96e2\u5b50\u6578\u91cf\u3002\u2217\u70ba\u4e86\u5340\u5206Ar^+$\u548cO$_2^+\uff0c\u63a2\u91dd\u9700\u8981\u7d50\u5408\u8cea\u91cf\u5206\u6790\u5668\uff0c\u6700\u5e38\u898b\u7684\u662f\u56db\u6975\u8cea\u8b5c\u5100(QuadrupoleMassSpectrometer,QMS)\u6216\u98db\u884c\u6642\u9593\u8cea\u8b5c\u5100(Time\u2212of\u2212FlightMassSpectrometer,TOF\u2212MS)\u3002\u63a2\u91dd\u982d\u4f5c\u70ba\u53d6\u6a23\u9ede\uff0c\u5c07\u96e2\u5b50\u5f15\u5c0e\u81f3\u8cea\u8b5c\u5100\u9032\u884c\u8cea\u91cf\u7be9\u9078\u548c\u80fd\u91cf\u5206\u6790\u3002\u2217\u900f\u904e\u5728\u4e0d\u540c\u4f4d\u7f6e\u79fb\u52d5\u63a2\u91dd\uff0c\u53ef\u4ee5\u91cf\u6e2c\u96e2\u5b50\u80fd\u91cf\u5206\u4f48\u7684\u7a7a\u9593\u8b8a\u5316\u3002\u2217\u2217\u2217\u91cf\u6e2c\u80fd\u529b\uff1a\u2217\u2217\u53ef\u4ee5\u76f4\u63a5\u91cf\u6e2c\u7279\u5b9a\u4f4d\u7f6e\u8655Ar^+$\u548cO$_2^+\u7684\u96e2\u5b50\u80fd\u91cf\u5206\u4f48\u51fd\u6578(IEDF)\u3002\u96e2\u5b50\u6eab\u5ea6\u53ef\u4ee5\u5f9eIEDF\u7684\u9ad8\u80fd\u5c3e\u90e8\u6216\u901a\u904e\u64ec\u5408\u9ea5\u514b\u65af\u97cb\u5206\u4f48\u4f86\u4f30\u7b97\uff0c\u4f46\u9700\u6ce8\u610f\u78c1\u63a7\u96fb\u6f3f\u7684IEDF\u901a\u5e38\u662f\u975e\u9ea5\u514b\u65af\u97cb\u5206\u4f48\u7684\u3002\u91cf\u6e2c\u4f4d\u7f6e\u6c7a\u5b9a\u4e86\u7a7a\u9593\u5206\u4f48\u7684\u7372\u53d6\u3002\u2217\u2217\u2217\u512a\u9ede\uff1a\u2217\u2217\u53ef\u4ee5\u7372\u5f97\u7a2e\u5225\u7279\u7570\u6027(species\u2212specific)\u7684\u96e2\u5b50\u80fd\u91cf\u5206\u4f48\uff0c\u662f\u76f4\u63a5\u91cf\u6e2c\u96e2\u5b50\u80fd\u91cf\u7684\u6700\u4f73\u65b9\u6cd5\u3002\u2217\u2217\u2217\u7f3a\u9ede\u8207\u6311\u6230\uff1a\u2217\u2217\u2217\u2217\u2217\u7269\u7406\u64fe\u52d5\uff1a\u2217\u2217\u63a2\u91dd\u7684\u63d2\u5165\u6703\u986f\u8457\u64fe\u52d5\u96fb\u6f3f\uff0c\u7279\u5225\u662f\u5728\u9776\u6750\u9644\u8fd1\u7684\u9ad8\u5bc6\u5ea6\u5340\u57df\u3002\u2217\u2217\u2217\u6c89\u7a4d\u6c61\u67d3\uff1a\u2217\u2217\u6ffa\u5c04\u6c89\u7a4d\u7269\u6703\u5728\u63a2\u91dd\u8868\u9762\uff08\u7279\u5225\u662f\u53d6\u6a23\u5b54\uff09\u7d2f\u7a4d\uff0c\u5f71\u97ff\u91cf\u6e2c\u6e96\u78ba\u6027\uff0c\u9700\u8981\u5b9a\u671f\u6e05\u6f54\u6216\u66f4\u63db\u63a2\u91dd\u3002\u2217\u2217\u2217\u71b1\u8ca0\u8f09\uff1a\u2217\u2217\u9ad8\u5bc6\u5ea6\u96fb\u6f3f\u53ef\u80fd\u5c0d\u63a2\u91dd\u9020\u6210\u8f03\u5927\u7684\u71b1\u8ca0\u8f09\u3002\u2217\u2217\u2217\u7a7a\u9593\u9650\u5236\uff1a\u2217\u2217\u9776\u6750\u5c3a\u5bf8\u5927\u4e14\u8cbc\u58c1\u5b89\u88dd\uff0c\u5f88\u96e3\u5728\u9776\u6750\u8868\u9762\u9644\u8fd1\u9032\u884c\u5168\u9762\u7684\u63a2\u91dd\u6383\u63cf\u3002\u53ef\u80fd\u53ea\u80fd\u5728\u96e2\u9776\u6750\u4e00\u5b9a\u8ddd\u96e2\u6216\u8154\u9ad4\u908a\u7de3\u8655\u91cf\u6e2c\u3002\u2217\u2217\u2217\u8108\u885d\u540c\u6b65\uff1a\u2217\u2217\u9700\u8981\u91cf\u6e2c\u8a2d\u5099\u8207\u8108\u885d\u96fb\u6e90\u540c\u6b65\uff0c\u4ee5\u7372\u53d6\u6642\u9593\u5206\u8fa8\u7684IE\u200b\u200bDF\u3002\u2217\u2217\u2217O2\u8150\u8755\uff1a\u2217\u2217O2\u96fb\u6f3f\u53ef\u80fd\u8150\u8755\u63a2\u91dd\u6750\u6599\u3002\u2217\u2217B.\u975e\u7834\u58de\u6027\u91cf\u6e2c(Non\u2212destructiveMeasurement)\u2217\u2217\u9019\u985e\u65b9\u6cd5\u4e0d\u5c07\u91cf\u6e2c\u88dd\u7f6e\u63d2\u5165\u96fb\u6f3f\u5167\u90e8\uff0c\u901a\u5e38\u901a\u904e\u5149\u5b78\u6216\u5f9e\u8154\u58c1\u53d6\u6a23\u7684\u65b9\u5f0f\u9032\u884c\u30021.\u2217\u2217\u5149\u5b78\u767c\u5c04\u5149\u8b5c\u5100(OpticalEmissionSpectroscopy,OES)\uff1a\u2217\u2217\u2217\u2217\u2217\u4f5c\u6cd5\uff1a\u2217\u2217\u2217\u901a\u904e\u8154\u9ad4\u5074\u9762\u7684\u5149\u5b78\u8996\u7a97\u6536\u96c6\u96fb\u6f3f\u767c\u51fa\u7684\u5149\u3002\u2217\u4f7f\u7528\u5149\u8b5c\u5100\u5206\u6790\u5149\u7684\u6ce2\u9577\u548c\u5f37\u5ea6\u3002Ar^+$\u548cO$_2^+$\u90fd\u6709\u7279\u5fb5\u7684\u767c\u5c04\u8b5c\u7dda\u3002 * \u901a\u904e\u72f9\u7e2b\u6216\u5149\u7e96\u63a2\u982d\u5728\u4e0d\u540c\u4f4d\u7f6e\u63a1\u96c6\u5149\u4fe1\u865f\uff0c\u6216\u4f7f\u7528\u5177\u6709\u7a7a\u9593\u89e3\u6790\u5ea6\u7684\u6210\u50cf\u5149\u8b5c\u5100\uff0c\u53ef\u4ee5\u7372\u53d6\u767c\u5c04\u5f37\u5ea6\u7684\u7a7a\u9593\u5206\u4f48\uff0c\u9593\u63a5\u53cd\u6620\u6fc0\u767c\u614b\u96e2\u5b50\u5bc6\u5ea6\u7684\u5206\u4f48\u3002 * \u96e2\u5b50\u6eab\u5ea6\u4f30\u7b97\uff1a \u53ef\u4ee5\u901a\u904e\u91cf\u6e2c\u7279\u5b9a\u96e2\u5b50\u767c\u5c04\u8b5c\u7dda\u7684\u591a\u666e\u52d2\u5c55\u5bec (Doppler Broadening) \u4f86\u4f30\u7b97\u96e2\u5b50\u6eab\u5ea6\u3002\u7136\u800c\uff0c\u9019\u9700\u8981\u9ad8\u89e3\u6790\u5ea6\u7684\u5149\u8b5c\u5100\uff0c\u4e26\u4e14\u8981\u6392\u9664\u5176\u4ed6\u5c55\u5bec\u6a5f\u5236\uff08\u5982\u65af\u5854\u514b\u5c55\u5bec\u3001\u58d3\u529b\u5c55\u5bec\u3001\u5100\u5668\u5c55\u5bec\uff09\u7684\u5f71\u97ff\uff0c\u7279\u5225\u662f\u5c0d\u65bc\u5206\u5b50\u96e2\u5b50O$_2^+$\uff0c\u5176\u8b5c\u7dda\u53ef\u80fd\u66f4\u8907\u96dc\u3002 * \u91cf\u6e2c\u80fd\u529b\uff1a \u53ef\u4ee5\u8b58\u5225\u96fb\u6f3f\u4e2d\u7684\u767c\u5149\u7269\u7a2e\uff08\u5305\u62ec\u96e2\u5b50\uff09\uff0c\u7372\u5f97\u6fc0\u767c\u614b\u96e2\u5b50\u7684\u76f8\u5c0d\u7a7a\u9593\u5206\u4f48\u3002\u53ef\u4ee5\u5617\u8a66\u5229\u7528\u591a\u666e\u52d2\u5c55\u5bec\u4f30\u7b97\u96e2\u5b50\u6eab\u5ea6\uff0c\u4f46\u6e96\u78ba\u6027\u53ef\u80fd\u4e0d\u9ad8\u3002 * \u512a\u9ede\uff1a \u975e\u4fb5\u5165\u6027\uff0c\u5c0d\u96fb\u6f3f\u64fe\u52d5\u5c0f\uff1b\u8a2d\u5099\u76f8\u5c0d\u5e38\u898b\u3002\u53ef\u4ee5\u5feb\u901f\u7372\u53d6\u5927\u7bc4\u570d\u7684\u7a7a\u9593\u5206\u4f48\u4fe1\u606f\uff08\u5982\u679c\u7d50\u5408\u6383\u63cf\u6216\u6210\u50cf\uff09\u3002 * \u7f3a\u9ede\u8207\u6311\u6230\uff1a * \u9593\u63a5\u6027\uff1a OES\u91cf\u6e2c\u7684\u662f\u6fc0\u767c\u614b\u7269\u7a2e\uff0c\u8207\u57fa\u614b\u96e2\u5b50\u5bc6\u5ea6\u548c\u6eab\u5ea6\u4e0d\u662f\u76f4\u63a5\u95dc\u4fc2\uff0c\u4e2d\u9593\u6d89\u53ca\u5230\u8907\u96dc\u7684\u6fc0\u767c\u548c\u8f3b\u5c04\u904e\u7a0b\u3002 * \u7dda\u7a4d\u5206\uff1a \u6a19\u6e96\u7684OES\u662f\u6cbf\u8457\u8996\u7dda\u65b9\u5411\u7684\u5149\u7a4d\u5206\uff0c\u7372\u53d6\u7cbe\u78ba\u7684\u5c40\u90e8\u7a7a\u9593\u5206\u4f48\u9700\u8981\u65b7\u5c64\u6383\u63cf (Tomography) \u6280\u8853\u6216\u975e\u5e38\u7cbe\u7d30\u7684\u7a7a\u9593\u63a1\u96c6\u3002 * \u6eab\u5ea6\u91cf\u6e2c\u96e3\u5ea6\uff1a 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