PLASUS at PSE 2022 in Erfurt, Germany

Visit us at the PSE 2022 conference in Erfurt, Germany from September 12th to 15th, 2022.

At the PSE 2022 conference, PLASUS will present its latest development for plasma monitoring and process control:

  • The EMICON LC SYSTEM
  • The new SPECLINE 3 Software
  • Combined in-situ process monitoring of plasma and layer

As part of the technical program, our experts will present the latest developments in the following lecture:

At the accompanying industrial exhibition on September 13rd and 14th we will exhibit at the joint booth # 29. You are cordially invited to stop by and find out more details. We would be pleased to discuss with you possibilities to integrate our products in your applications. Admission to the industrial exhibition is free of charge on Wednesday, September 14th!

For reviewing the complete program and for registration please refer to the website of the PSE 2022.

We are very excited to meet you in person in Erfurt!