{"id":118,"date":"2011-12-19T23:38:17","date_gmt":"2011-12-19T15:38:17","guid":{"rendered":"http:\/\/aot-tek.com\/plasma-circus\/?p=118"},"modified":"2012-01-06T16:45:55","modified_gmt":"2012-01-06T08:45:55","slug":"%e5%8f%8d%e5%ba%94%e5%bc%8f%e7%ad%89%e7%a6%bb%e5%ad%90%e6%ba%85%e5%b0%84%e9%95%80%e8%86%9c%e5%b7%a5%e8%89%ba%e7%9a%84%e4%b8%89%e5%ae%9d","status":"publish","type":"post","link":"https:\/\/aot-tek.com\/plasma-circus\/?p=118","title":{"rendered":"\u53cd\u5e94\u5f0f\u7b49\u79bb\u5b50\u6e85\u5c04\u9540\u819c\u5de5\u827a\u7684\u4e09\u5b9d"},"content":{"rendered":"<h2><strong>\u8fdb\u884c\u7b49\u79bb\u5b50\u6e85\u5c04\u9540\u819c\u5de5\u827a\u65f6\uff0c\u6709\u4e09\u9879\u5b9d\u7269\u662f\u4e0d\u53ef\u6216\u7f3a\u7684\u3002<\/strong><\/h2>\n<ol>\n<li>\u7b49\u79bb\u5b50\u5de5\u827a\u76d1\u63a7\u5668\u00a0(plasma monitor and process controller)<\/li>\n<li>\u8109\u51b2\u5f0f\u76f4\u6d41\u7535\u6e90\u00a0(pulsed DC power supply) \u6216\u662f\u00a0\u4e2d\u9891\u4ea4\u6d41\u7535\u6e90\u00a0(MF AC power supply)<\/li>\n<li>\u78c1\u63a7\u6e85\u5c04\u9776\u00a0(magnetron sputtering source) \u6216\u79f0\u00a0\u9634\u6781\u9776\u00a0(cathode source)<\/li>\n<\/ol>\n<h2><strong>\u7b2c1\u9879\u7684\u7b49\u79bb\u5b50\u5de5\u827a\u76d1\u63a7\u5668\u4e3b\u8981\u8d1f\u8d23\u9540\u819c\u7684\u8d28\u91cf\u4e0e\u9540\u7387\u7684\u7a33\u5b9a\u3002<\/strong><\/h2>\n<p>\u5bf9\u53cd\u5e94\u6c14\u4f53(reactive gas)\u91c7\u7528\u9ad8\u901f\u7684PID\u95ed\u9501\u56de\u8def\u63a7\u5236(PID closed loop control)\uff0c\u5c06\u68c0\u6d4b\u5230\u7684\u7b49\u79bb\u5b50\u4fe1\u53f7\u5f3a\u5ea6\u6bd4\u5bf9\u5185\u90e8\u8bbe\u5b9a\u7684\u9884\u8bbe\u503c\uff0c\u6839\u636e\u6bd4\u5bf9\u7684\u7ed3\u679c\uff0c\u8f6c\u6210\u7535\u538b\u4fe1\u53f7\u5c06\u5dee\u5f02\u503c\u8f93\u51fa\u5230\u8d1f\u8d23\u4f9b\u5e94\u6c14\u4f53\u7684\u8d28\u6d41\u91cf\u8ba1(MFC: mass flow controller)\uff0c\u6539\u53d8\u4f9b\u5e94\u6c14\u4f53\u7684\u6d41\u91cf\u6765\u4fee\u6b63\u5b9e\u9645\u7b49\u79bb\u5b50\u4f53\u5b9e\u9645\u53cd\u5e94\u7684\u72b6\u6001\u3002\u518d\u64b7\u53d6\u6539\u53d8\u540e\u7684\u7b49\u79bb\u5b50\u4f53\u7684\u4fe1\u53f7\u5f3a\u5ea6\uff0c\u53c8\u7ecf\u6bd4\u5bf9\u4ea7\u751f\u4fee\u6b63\u7684\u7535\u538b\u4fe1\u53f7\uff0c\u91cd\u590d\u4fee\u6b63\u6c14\u4f53\u6d41\u91cf\u6765\u53d8\u5316\u7b49\u79bb\u5b50\u4f53\u7684\u884c\u4e3a\u8868\u73b0\u3002\u5982\u6b64\u5468\u800c\u590d\u59cb\uff0c\u4e00\u76f4\u4fee\u6b63\u5230\u5b9e\u6d4b\u7684\u7b49\u79bb\u5b50\u4f53\u4fe1\u53f7\u4e0e\u5185\u8ba2\u7684\u9884\u8bbe\u503c\u63a5\u8fd1\uff0c\u751a\u81f3\u76f8\u540c\u3002\u5728\u53cd\u5e94\u5f0f\u7684\u6e85\u5c04\u9540\u819c\u671f\u95f4\uff0c\u9700\u8981\u80fd\u591f\u5feb\u901f\u53cd\u5e94\u6539\u53d8\u6c14\u4f53\u7684\u6d41\u91cf\uff0c\u4e3b\u8981\u76ee\u7684\u5728\u4e8e\u7a33\u5b9a\u6e85\u5c04\u51fa\u6765\u7684\u91d1\u5c5e\u9776\u6750\u539f\u5b50\u6216\u5206\u5b50\u4e0e\u53cd\u5e94\u6c14\u4f53\u4e4b\u95f4\u80fd\u591f\u7ef4\u6301\u5728\u4e00\u4e2a\u56fa\u5b9a\u7684\u6bd4\u4f8b(\u5408\u91d1\u6bd4\u4f8b)\u3002\u5982\u679c\uff0c\u53d8\u5316\u53cd\u5e94\u6c14\u4f53\u7684\u901f\u5ea6\u592a\u6162\uff0c\u5408\u91d1\u6bd4\u4f8b\u53ea\u80fd\u5728\u9971\u548c\u533a\u7ef4\u6301\uff0c\u4e14\u9540\u819c\u901f\u7387\u5c06\u4f1a\u5f88\u6162\u3002\u8981\u80fd\u591f\u63d0\u9ad8\u9540\u819c\u901f\u7387\u53c8\u80fd\u6539\u53d8\u5408\u91d1\u6bd4\u4f8b\u4e14\u7ef4\u6301\u7a33\u5b9a\u7684\u9540\u819c\u72b6\u6001\uff0c\u8fd9\u4e2a\u7b49\u79bb\u5b50\u5de5\u827a\u76d1\u63a7\u5668\u626e\u6f14\u6781\u4e3a\u91cd\u8981\u4e14\u5173\u952e\u7684\u89d2\u8272\u3002<\/p>\n<div id=\"attachment_119\" style=\"width: 310px\" class=\"wp-caption aligncenter\"><a href=\"https:\/\/aot-tek.com\/plasma-circus\/wp-content\/uploads\/2011\/12\/closed-loop-control.png\"><img decoding=\"async\" aria-describedby=\"caption-attachment-119\" class=\"size-full wp-image-119\" title=\"closed-loop-control\" src=\"https:\/\/aot-tek.com\/plasma-circus\/wp-content\/uploads\/2011\/12\/closed-loop-control.png\" alt=\"\" width=\"300\" height=\"219\" \/><\/a><p id=\"caption-attachment-119\" class=\"wp-caption-text\">PID Closed Loop Contorl<\/p><\/div>\n<p><!--more--><\/p>\n<h2><strong>\u7b2c2\u9879\u662f\u4ea7\u751f<\/strong><strong>\u7b49\u79bb\u5b50\u6700\u91cd\u8981\u7684\u7535\u6e90\u4f9b\u5e94\u5668\uff0c\u8d1f\u8d23\u7a33\u5b9a\u4f9b\u5e94\u6700\u9ad8\u9540\u819c\u901f\u7387\u6240\u9700\u7684\u80fd\u91cf\uff0c\u540c\u65f6\u4e5f\u8981\u9632\u6b62\u4e0e\u6d88\u9664\u7535\u5f27\u9020\u6210\u7684\u635f\u574f\u3002<\/strong><\/h2>\n<p><strong><\/strong>\u57fa\u4e8e\u53cd\u5e94\u5f0f\u9540\u819c\u5de5\u827a\u5728\u9776\u6750\u8868\u9762\u5904\uff0c\u82e5\u4f7f\u7528\u7eaf\u76f4\u6d41\u7535\u6e90(DC power supply)\uff0c\u4f1a\u56e0\u4e3a\u7535\u5b50\u4e91\u7684\u5806\u79ef\u963b\u788d\u9540\u819c\u901f\u7387\u3002\u8109\u51b2\u5f0f\u76f4\u6d41\u7535\u6e90\u4f9b\u5e94\u5668\u4e0e\u4e2d\u9891\u7535\u6e90\u4f9b\u5e94\u5668\u90fd\u9700\u8981\u53cc\u78c1\u63a7\u9776\u4e0a\u7684\u7535\u538b\u4fdd\u6301\u6d6e\u52a8\uff0c\u4e0d\u53ef\u4ee5\u63a5\u5730\u3002\u4e24\u652f\u78c1\u63a7\u9776\u4e2a\u522b\u63a5\u4e0a\u7535\u6e90\u4f9b\u5e94\u5668\u7684\u4e24\u4e2a\u6b63\u8d1f\u8f93\u51fa\uff0c\u7535\u6e90\u4f9b\u5e94\u5668\u5185\u90e8\u7684\u63a7\u5236\u7535\u8def\u4f1a\u4ee5\u4e2d\u9891\u9891\u7387\u5207\u6362\u4e24\u4e2a\u6781\u6027\u7684\u8f93\u51fa\uff0c\u8ba9\u4e24\u4e2a\u9776\u9762\u4e0a\u7684\u7535\u5b50\u80fd\u591f\u6709\u6548\u5730\u758f\u6563\uff0c\u5982\u6b64\u53ef\u4ee5\u63d0\u9ad8\u6e85\u5c04\u9540\u819c\u7684\u901f\u7387\uff0c\u4e5f\u53ef\u4ee5\u9632\u6b62\u9776\u6750\u8868\u9762\u56e0\u4e3a\u7535\u5b50\u7535\u8377\u5806\u79ef\u592a\u591a\u9020\u6210\u7535\u5f27\u653e\u7535\uff0c\u5f15\u8d77\u9540\u819c\u8d28\u91cf\u4e0d\u5fc5\u8981\u7684\u635f\u5931\u3002<\/p>\n<div id=\"attachment_121\" style=\"width: 406px\" class=\"wp-caption aligncenter\"><a href=\"https:\/\/aot-tek.com\/plasma-circus\/wp-content\/uploads\/2011\/12\/multi-cathode-sputtering-with-ion-beam-assisted-jst.jpg\"><img decoding=\"async\" aria-describedby=\"caption-attachment-121\" class=\"size-full wp-image-121\" title=\"multi-cathode-sputtering-with-ion-beam-assisted-jst\" src=\"https:\/\/aot-tek.com\/plasma-circus\/wp-content\/uploads\/2011\/12\/multi-cathode-sputtering-with-ion-beam-assisted-jst.jpg\" alt=\"\" width=\"396\" height=\"298\" srcset=\"https:\/\/aot-tek.com\/plasma-circus\/wp-content\/uploads\/2011\/12\/multi-cathode-sputtering-with-ion-beam-assisted-jst.jpg 396w, https:\/\/aot-tek.com\/plasma-circus\/wp-content\/uploads\/2011\/12\/multi-cathode-sputtering-with-ion-beam-assisted-jst-300x225.jpg 300w\" sizes=\"(max-width: 396px) 100vw, 396px\" \/><\/a><p id=\"caption-attachment-121\" class=\"wp-caption-text\">Reactive magnetron co-sputtering process with ion beam assisted and pulsed DC bias on the substrate<\/p><\/div>\n<p><!--more--><\/p>\n<h2><strong>\u7b2c3\u9879\u7684\u78c1\u63a7\u6e85\u5c04\u9776(\u7b80\u79f0\uff1a\u6e85\u5c04\u9776)\u662f\u5173\u7cfb\u5230\u9776\u6750\u7684\u4f7f\u7528\u7387\u4ee5\u53ca\u6e85\u5c04\u6548\u7387\u7684\u597d\u574f\u3002<\/strong><\/h2>\n<p>\u597d\u7684\u78c1\u63a7\u9776\u5177\u6709\u597d\u7684\u9776\u6750\u51b7\u5374\u80fd\u529b\u4ee5\u53ca\u9ad8\u7684\u9776\u6750\u4f7f\u7528\u7387\u3002\u5f53\u78c1\u63a7\u9776\u7684\u8bbe\u8ba1\u80fd\u591f\u627f\u53d7\u9ad8\u529f\u7387\u7684\u6e85\u5c04\u9540\u819c\u5de5\u827a\uff0c\u7b2c2\u9879\u7684\u7535\u6e90\u4f9b\u5e94\u5668\u5c31\u80fd\u591f\u5b8c\u5168\u53d1\u6325\uff0c\u63d0\u9ad8\u9540\u819c\u7684\u901f\u7387\uff0c\u518d\u52a0\u4e0a\u7b2c1\u9879\u7684\u5b8c\u7f8e\u63a7\u5236\uff0c\u5c31\u80fd\u591f\u9540\u51fa\u9ad8\u8d28\u91cf\uff0c\u9ad8\u4ea7\u51fa\u7684\u9540\u819c\u3002\u5982\u679c\u78c1\u63a7\u9776\u7684\u9776\u6750\u4f7f\u7528\u7387\u504f\u4f4e\uff0c\u751f\u4ea7\u8fc7\u7a0b\u4e2d\u5c31\u5fc5\u987b\u7ecf\u5e38\u505c\u8f66\u6362\u9776\u6750\uff0c\u65e0\u5f62\u4e2d\u6d6a\u8d39\u8bb8\u591a\u7684\u65f6\u95f4\uff0c\u4e5f\u63d0\u9ad8\u751f\u4ea7\u6210\u672c\u3002\u56e0\u6b64\uff0c\u78c1\u63a7\u9776\u4e5f\u5728\u53cd\u5e94\u5f0f\u6e85\u5c04\u9540\u819c\u5de5\u827a\u4e2d\u5c45\u5341\u5206\u91cd\u8981\u7684\u89d2\u8272\u3002<\/p>\n<div id=\"attachment_120\" style=\"width: 518px\" class=\"wp-caption aligncenter\"><a href=\"https:\/\/aot-tek.com\/plasma-circus\/wp-content\/uploads\/2011\/12\/dual-magnetron-sio2-ydt.jpg\"><img decoding=\"async\" aria-describedby=\"caption-attachment-120\" class=\"size-full wp-image-120\" title=\"dual-magnetron-sio2-ydt\" src=\"https:\/\/aot-tek.com\/plasma-circus\/wp-content\/uploads\/2011\/12\/dual-magnetron-sio2-ydt.jpg\" alt=\"\" width=\"508\" height=\"297\" srcset=\"https:\/\/aot-tek.com\/plasma-circus\/wp-content\/uploads\/2011\/12\/dual-magnetron-sio2-ydt.jpg 508w, https:\/\/aot-tek.com\/plasma-circus\/wp-content\/uploads\/2011\/12\/dual-magnetron-sio2-ydt-300x175.jpg 300w\" sizes=\"(max-width: 508px) 100vw, 508px\" \/><\/a><p id=\"caption-attachment-120\" class=\"wp-caption-text\">Reactive sputtering for SiO2 with dual magnetron sputtering configuration<\/p><\/div>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u8fdb\u884c\u7b49\u79bb\u5b50\u6e85\u5c04\u9540\u819c\u5de5\u827a\u65f6\uff0c\u6709\u4e09\u9879\u5b9d\u7269\u662f\u4e0d\u53ef\u6216\u7f3a\u7684\u3002 &#46;&#46;&#46;<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[3,6,5],"tags":[],"class_list":["post-118","post","type-post","status-publish","format-standard","hentry","category-closed-loop-control","category-magnetron-cathode-sputtering","category-pulsed-power-supply"],"_links":{"self":[{"href":"https:\/\/aot-tek.com\/plasma-circus\/index.php?rest_route=\/wp\/v2\/posts\/118","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/aot-tek.com\/plasma-circus\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/aot-tek.com\/plasma-circus\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/aot-tek.com\/plasma-circus\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/aot-tek.com\/plasma-circus\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=118"}],"version-history":[{"count":3,"href":"https:\/\/aot-tek.com\/plasma-circus\/index.php?rest_route=\/wp\/v2\/posts\/118\/revisions"}],"predecessor-version":[{"id":138,"href":"https:\/\/aot-tek.com\/plasma-circus\/index.php?rest_route=\/wp\/v2\/posts\/118\/revisions\/138"}],"wp:attachment":[{"href":"https:\/\/aot-tek.com\/plasma-circus\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=118"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/aot-tek.com\/plasma-circus\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=118"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/aot-tek.com\/plasma-circus\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=118"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}