{"id":61,"date":"2011-09-08T14:59:19","date_gmt":"2011-09-08T06:59:19","guid":{"rendered":"http:\/\/aot-tek.com\/plasma-circus\/?p=61"},"modified":"2011-09-24T20:33:50","modified_gmt":"2011-09-24T12:33:50","slug":"%e5%8f%a6%e5%a4%96%e4%b8%80%e5%80%8b%e8%bf%b7%e6%80%9d-pem%e7%9a%84%e9%96%89%e9%8e%96%e8%bf%b4%e8%b7%af%e6%8e%a7%e5%88%b6%e8%a6%81%e7%94%a8mfc%e6%88%96%e6%98%afpzt-valve","status":"publish","type":"post","link":"https:\/\/aot-tek.com\/plasma-circus\/?p=61","title":{"rendered":"\u53e6\u5916\u4e00\u500b\u8ff7\u601d: PEM\u7684\u9589\u9396\u8ff4\u8def\u63a7\u5236\u8981\u7528MFC\u6216\u662fPZT valve"},"content":{"rendered":"

<\/p>\n

\u7e41\u9ad4\u7248<\/h2>\n


\n\u9019\u662f\u500b\u5728\u4f7f\u7528PEM\u9589\u9396\u8ff4\u8def\u63a7\u5236\u6642\uff0c\u7d93\u5e38\u9047\u5230\u7684\u554f\u984c:
\n\u5230\u5e95\u8981\u7528<\/strong>MFC (Mass Flow Controller)<\/strong>\u5c31\u80fd\u5920\u64d4\u8ca0\u88fd\u7a0b\u7684\u91cd\u8cac\u5927\u4efb<\/strong>? <\/strong>\u9084\u662f\u9700\u8981\u4f7f\u7528<\/strong>PZT valve?<\/strong>
\n\u7528\u4e00\u500b\u5f88\u7c21\u55ae\u7684\u6a21\u578b\u4f86\u5206\u6790\u5c31\u53ef\u4ee5\u505a\u51fa\u6b63\u78ba\u7684\u5224\u65b7\uff0c\u4e0d\u6703\u9078\u64c7\u932f\u8aa4\u4e86\u3002
\n\u8981\u9054\u6210\u4e00\u500bPEM\u9589\u9396\u8ff4\u8def\u63a7\u5236\u7684\u88fd\u7a0b\uff0c\u9700\u8981\u4e0b\u5217\u7684\u7269\u4ef6\u624d\u80fd\u5b8c\u6210\u3002
\n1. \u611f\u6e2c\u982d: \u5c07\u96fb\u6f3f\u5149\u8b5c\u7684\u5149\u7dda\u6536\u96c6\u50b3\u905e\u7d66\u5075\u6e2c\u5668\u3002\u9019\u901a\u5e38\u662f\u7531\u5149\u5b78\u93e1\u982d\u8207\u5149\u7e96\u7d44\u6210\u7684\u786c\u9ad4\uff0c\u5c07\u5149\u8a0a\u865f\u50b3\u905e\u5230\u5075\u6e2c\u5668\u505a\u5149\u96fb\u8a0a\u865f\u7684\u8f49\u63db\u3002\u56e0\u70ba\u662f\u5149\u901f\u5728\u50b3\u905e\u8a0a\u865f\uff0c\u6240\u4ee5\u9700\u8981\u7684\u6642\u9593\u53ef\u4ee5\u5ffd\u7565\u3002
\n2. \u5075\u6e2c\u5668: \u6709\u611f\u5ea6\u5341\u5206\u9748\u654f\u7684\u5149\u96fb\u500d\u589e\u7ba1PMT (Photo-Multiplier Tube)\uff0c\u901a\u5e38\u8f49\u63db\u6642\u9593\u5c0f\u65bc1 ns; \u53e6\u5916\u4e00\u7a2e\u662fCCD\u5075\u6e2c\u5668\uff0c\u8f49\u63db\u6642\u9593\u5927\u7d04\u9700\u89811~2 ms\u3002
\n3. CPU \/ MPU\u8edf\u9ad4\u8655\u7406: \u5149\u8a0a\u865f\u8f49\u6210\u96fb\u7684\u8a0a\u865f\uff0c\u7d93\u7531\u96fb\u8166\u8edf\u9ad4\u7684\u8a08\u7b97\u8207\u8655\u7406\u7522\u751f\u53ef\u505a\u63a7\u5236\u7684\u8a0a\u865f\u8f38\u51fa\uff0c\u9700\u8981\u7684\u6642\u9593\u5927\u7d045-10 ms\u3002
\n4. MFC\u6216\u662fPZT Valve: \u63a7\u5236\u53cd\u61c9\u6027\u6c23\u9ad4\u6d41\u91cf\u7684\u95a5\u9580\u5f9e\u63a5\u6536\u5230\u96fb\u8166\u50b3\u4f86\u7684\u63a7\u5236\u8a0a\u865f\u5230\u8abf\u6574\u95a5\u9580\u958b\u555f\u7684\u5927\u5c0f\u5230\u9054\u6307\u5b9a\u7684\u4f4d\u7f6e\u6240\u9700\u7684\u6642\u9593\uff0c\u597d\u7684MFC\u6700\u5feb\u53ef\u4ee5\u5728\u5e7e\u500bms\u9054\u6210\uff0cPZT Valve\u53ef\u4ee5\u5728\u5c0f\u65bc1 ms\u5167\u9054\u6210\u3002
\n5. \u6c23\u9ad4\u7ba1\u8def: \u6c23\u9ad4\u7d93\u904e\u6c23\u95a5\u5f8c\u9700\u8981\u6d41\u7d93\u6c23\u9ad4\u7ba1\u8def\u5230\u9054\u771f\u7a7a\u5674\u51fa\u7684\u4f4d\u7f6e\uff0c\u9019\u6bb5\u6642\u9593\u8996\u771f\u7a7a\u934d\u819c\u7cfb\u7d71\u7684\u771f\u7a7a\u62bd\u6c23\u8a2d\u8a08\u4f86\u6c7a\u5b9a\u9577\u77ed\uff0c\u901a\u5e38\u9700\u898120 ms(\u7cfb\u7d71\u6709\u5f88\u597d\u7684\u771f\u7a7a\u62bd\u6c23\u8a2d\u8a08)\u5230200 ms\u4e0d\u7b49\u3002
\n6. \u64f4\u6563: \u6c23\u9ad4\u62b5\u9054\u771f\u7a7a\u5167\u90e8\u7684\u5674\u5634\u4f4d\u7f6e\uff0c\u6703\u4f9d\u7167\u7576\u6642\u771f\u7a7a\u5ea6\u7684\u88fd\u7a0b\u689d\u4ef6\u4ee5\u64f4\u6563\u7684\u65b9\u5f0f\u96e2\u958b\u5674\u5634\u5230\u9054\u96fb\u6f3f\u88fd\u7a0b\u7684\u5340\u57df\uff0c\u9019\u6bb5\u6642\u9593\u901a\u5e38\u5c0f\u65bc1 ms.<\/p>\n

\u91cd\u8907\u9019\u516d\u500b\u6b65\u9a5f\u5c31\u662f\u4e00\u500b\u5b8c\u6574\u7684\u96fb\u6f3f\u53cd\u61c9\u6027\u9589\u9396\u8ff4\u8def\u7684\u63a7\u5236\u6d41\u7a0b\u3002
\n\u56e0\u6b64\uff0c\u4e5f\u5f88\u5bb9\u6613\u770b\u51fa\u4f7f\u7528\u597d\u7684MFC\u5927\u81f4\u5c31\u80fd\u6eff\u8db3\u9019\u7a2e\u88fd\u7a0b\u7684\u8981\u6c42\u4e86\u3002
\n

\n

\n

<\/p>\n

\u7b80\u4f53\u7248<\/h2>\n

<\/p>\n

\u8fd9\u662f\u4e2a\u5728\u4f7f\u7528PEM\u95ed\u73af\u63a7\u5236\u65f6\uff0c\u7ecf\u5e38\u9047\u5230\u7684\u95ee\u9898:
\n\u5230\u5e95\u8981\u7528<\/strong>MFC (Mass Flow Controller)<\/strong>\u5c31\u80fd\u591f\u62c5\u8d1f\u5de5\u827a\u7684\u91cd\u8d23\u5927\u4efb<\/strong>? <\/strong>\u8fd8\u662f\u9700\u8981\u4f7f\u7528<\/strong>PZT valve?<\/strong><\/p>\n

\u7528\u4e00\u4e2a\u5f88\u7b80\u5355\u7684\u6a21\u578b\u6765\u5206\u6790\u5c31\u53ef\u4ee5\u505a\u51fa\u6b63\u786e\u7684\u5224\u65ad\uff0c\u4e0d\u4f1a\u9009\u62e9\u9519\u8bef\u4e86\u3002
\n\u8981\u8fbe\u6210\u4e00\u4e2aPEM\u95ed\u73af\u63a7\u5236\u7684\u5de5\u827a\uff0c\u9700\u8981\u4e0b\u5217\u7684\u7ec4\u4ef6\u624d\u80fd\u5b8c\u6210\u3002
\n1. \u4f20\u611f\u5668: \u5c06\u7b49\u79bb\u5b50\u4f53\u5149\u8c31\u7684\u5149\u7ebf\u6536\u96c6\u4f20\u9012\u7ed9\u4f20\u611f\u5668\u3002\u8fd9\u901a\u5e38\u662f\u7531\u5149\u5b66\u955c\u5934\u4e0e\u5149\u7ea4\u7ec4\u6210\u7684\u786c\u4ef6\uff0c\u5c06\u5149\u4fe1\u53f7\u4f20\u9012\u5230\u4f20\u611f\u5668\u505a\u5149\u7535\u4fe1\u53f7\u7684\u8f6c\u6362\u3002\u56e0\u4e3a\u662f\u5149\u901f\u5728\u4f20\u9012\u4fe1\u53f7\uff0c\u6240\u4ee5\u9700\u8981\u7684\u65f6\u95f4\u53ef\u4ee5\u5ffd\u7565\u3002
\n2. \u4f20\u611f\u5668: \u6709\u611f\u5ea6\u5341\u5206\u7075\u654f\u7684\u5149\u7535\u500d\u589e\u7ba1PMT (Photo-Multiplier Tube)\uff0c\u901a\u5e38\u8f6c\u6362\u65f6\u95f4\u5c0f\u4e8e1 ns; \u53e6\u5916\u4e00\u79cd\u662fCCD\u4f20\u611f\u5668\uff0c\u8f6c\u6362\u65f6\u95f4\u5927\u7ea6\u9700\u89811~2 ms\u3002
\n3. CPU \/ MPU\u8f6f\u4ef6\u5904\u7406: \u5149\u4fe1\u53f7\u8f6c\u6210\u7535\u7684\u4fe1\u53f7\uff0c\u7ecf\u7531\u8ba1\u7b97\u673a\u8f6f\u4ef6\u7684\u8ba1\u7b97\u4e0e\u5904\u7406\u4ea7\u751f\u53ef\u505a\u63a7\u5236\u7684\u4fe1\u53f7\u8f93\u51fa\uff0c\u9700\u8981\u7684\u65f6\u95f4\u5927\u7ea65-10 ms\u3002
\n4. MFC\u6216\u662fPZT Valve: \u63a7\u5236\u53cd\u5e94\u6027\u6c14\u4f53\u6d41\u91cf\u7684\u9600\u95e8\u4ece\u63a5\u6536\u5230\u8ba1\u7b97\u673a\u4f20\u6765\u7684\u63a7\u5236\u4fe1\u53f7\u5230\u8c03\u6574\u9600\u95e8\u5f00\u542f\u7684\u5927\u5c0f\u5230\u8fbe\u6307\u5b9a\u7684\u4f4d\u7f6e\u6240\u9700\u7684\u65f6\u95f4\uff0c\u597d\u7684MFC\u6700\u5feb\u53ef\u4ee5\u5728\u51e0\u4e2ams\u8fbe\u6210\uff0cPZT Valve\u53ef\u4ee5\u5728\u5c0f\u4e8e1 ms\u5185\u8fbe\u6210\u3002
\n5. \u6c14\u4f53\u7ba1\u8def: \u6c14\u4f53\u7ecf\u8fc7\u6c14\u9600\u540e\u9700\u8981\u6d41\u7ecf\u6c14\u4f53\u7ba1\u8def\u5230\u8fbe\u771f\u7a7a\u55b7\u51fa\u7684\u4f4d\u7f6e\uff0c\u8fd9\u6bb5\u65f6\u95f4\u89c6\u771f\u7a7a\u9540\u819c\u7cfb\u7edf\u7684\u771f\u7a7a\u62bd\u6c14\u8bbe\u8ba1\u6765\u51b3\u5b9a\u957f\u77ed\uff0c\u901a\u5e38\u9700\u898120 ms(\u7cfb\u7edf\u6709\u5f88\u597d\u7684\u771f\u7a7a\u62bd\u6c14\u8bbe\u8ba1)\u5230200 ms\u4e0d\u7b49\u3002
\n6. \u6269\u6563: \u6c14\u4f53\u62b5\u8fbe\u771f\u7a7a\u5185\u90e8\u7684\u55b7\u5634\u4f4d\u7f6e\uff0c\u4f1a\u4f9d\u7167\u5f53\u65f6\u771f\u7a7a\u5ea6\u7684\u5de5\u827a\u6761\u4ef6\u4ee5\u6269\u6563\u7684\u65b9\u5f0f\u79bb\u5f00\u55b7\u5634\u5230\u8fbe\u7b49\u79bb\u5b50\u4f53\u5de5\u827a\u7684\u533a\u57df\uff0c\u8fd9\u6bb5\u65f6\u95f4\u901a\u5e38\u5c0f\u4e8e1 ms.<\/p>\n

\u91cd\u590d\u8fd9\u516d\u4e2a\u6b65\u9aa4\u5c31\u662f\u4e00\u4e2a\u5b8c\u6574\u7684\u7b49\u79bb\u5b50\u4f53\u53cd\u5e94\u6027\u95ed\u73af\u7684\u63a7\u5236\u6d41\u7a0b\u3002
\n\u56e0\u6b64\uff0c\u4e5f\u5f88\u5bb9\u6613\u770b\u51fa\u4f7f\u7528\u597d\u7684MFC\u5927\u81f4\u5c31\u80fd\u6ee1\u8db3\u8fd9\u79cd\u5de5\u827a\u7684\u8981\u6c42\u4e86\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"

\u7e41\u9ad4\u7248 \u9019\u662f\u500b\u5728\u4f7f\u7528PEM\u9589\u9396\u8ff4\u8def\u63a7\u5236\u6642\uff0c\u7d93\u5e38\u9047\u5230\u7684...<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[3],"tags":[],"class_list":["post-61","post","type-post","status-publish","format-standard","hentry","category-closed-loop-control"],"_links":{"self":[{"href":"https:\/\/aot-tek.com\/plasma-circus\/index.php?rest_route=\/wp\/v2\/posts\/61","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/aot-tek.com\/plasma-circus\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/aot-tek.com\/plasma-circus\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/aot-tek.com\/plasma-circus\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/aot-tek.com\/plasma-circus\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=61"}],"version-history":[{"count":14,"href":"https:\/\/aot-tek.com\/plasma-circus\/index.php?rest_route=\/wp\/v2\/posts\/61\/revisions"}],"predecessor-version":[{"id":98,"href":"https:\/\/aot-tek.com\/plasma-circus\/index.php?rest_route=\/wp\/v2\/posts\/61\/revisions\/98"}],"wp:attachment":[{"href":"https:\/\/aot-tek.com\/plasma-circus\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=61"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/aot-tek.com\/plasma-circus\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=61"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/aot-tek.com\/plasma-circus\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=61"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}