PLASUS is a leading manufacturer of plasma monitor and process control systems for low-pressure as well as atmospheric pressure plasma applications in productions lines as well as R&D. The turnkey and modular configurable systems of the EMICON series can be equipped with all necessary features to observe, analyze, and control typical process plasmas for scientific and industrial applications. The spectrometer units of the EMICON systems cover the UV-VIS-NIR range and thus detect all process-relevant species simultaneously. For spatially resolved control, the EMICON systems can be equipped with up to eight spectrometer channels. Various add-on modules enable the system to adapt to specific applications: An I/O module with multiple voltage inputs allows the acquisition and processing of external sensor signals. For pulsed applications, the EMICON SA-HIPIMS extension records the waveform of voltage and current pulses, which can be analyzed in real-time and used for process control. For surface processes, the EMICON LC module offers the option to determine in situ layer properties such as reflection, transmission, layer thickness or color. PLASUS offers a wide variety of in-vacuum and ex-vacuum optics to meet the requirements of different applications. The sensor heads of the collimator optics for vacuum are equipped with a special coating protection attachment to reduce contamination and coating of the optical elements and thus ensure long service lives. SPECLINE is a powerful software package for the analysis and identification of spectral data. The worldwide unique database for atoms and molecules in combination with a powerful user interface makes line identification easy and fast.

PLASUS是等離子體監測儀和過程控制系統的領先製造商，用於生產線和研發中的低壓和常壓等離子體應用。EMICON系列的交鑰匙和模組化可配置系統可以配備所有必要的功能，以觀察、分析和控制科學和工業應用中的典型過程等離子體。EMICON系統的光譜儀單元覆蓋UV-VIS-NIR範圍，因此可以同時檢測所有與過程相關的物質。對於空間分辨控制，EMICON系統可以配備多達8個光譜儀通道。各種附加模組使系統能夠適應特定應用：具有多個電壓輸入的 I/O 模組允許採集和處理外部感測器信號。對於脈衝應用，EMICON SA-HIPIMS 擴展記錄電壓和電流脈衝的波形，可以即時分析並用於過程控制。對於表面處理，EMICON LC模組提供了確定原位層屬性的選項，如反射、透射、層厚或顏色。PLASUS提供各種真空和超真空光學器件，以滿足不同應用的要求。用於真空的準直器光學元件的感測器頭配備了特殊的塗層保護附件，以減少光學元件的污染和塗層，從而確保較長的使用壽命。SPECLINE是一款功能強大的軟體包，用於分析和識別光譜數據。全球獨一無二的原子和分子資料庫與強大的使用者介面相結合，使譜系識別變得簡單快捷。

Product range:
– EMICON SA
– EMICON FS
– EMICON MC
– EMICON LC
– EMICON HR
– Optical Components

Software:
– EMICON
– SpecLine

規格書下載請聯絡: sales@aot-tek.com