分類: Closed Loop PID Control For Reactive Sputtering Applications
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如何應用OES tool與RGA tool
繁體版 常有人問道: 對需要精準控制的電漿(等離子)製程(工藝)中，到底要使用OES還是RGA呢? 說明如下:…
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Plasma Emission Monitor (PEM)的分類
繁體版 Plasma Emission Monitor (PEM)有兩大主流: (a) lens filter…
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How long to clean the protection device of collimator
繁體版 準直鏡頭上的蜂巢式防鍍裝置(honey comb protection device)，不是filte…
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Advanced EMICON (Emission Controller) system vs. traditional PEM (Plasma Emission Controller) system
A traditional PEM (Plasma Emission Monitor) system in c…