What is the purpose of using remote LAN control via EMICON RC DLL? (使用LAN遠端控制的目的)

主要目的是從中央控制室(很遠處,在無塵室外頭)要掌握生產線上使用的每一個EMICON工作站(個別IP)的狀況,以及從中央控製室對各別的EMICON線上工作站下達對應製程的製程參數(RECIPE)。例如: 對大型設備而言,特別是多腔體(multi-chamber)的生產線,線上有很多套EMICON工作站。


Good coating protection by a honey comb protection device in front of a quartz collimator lens (PECVD process)

On a PECVD process to coat SiO2 layer with SiH4 precursor reacted with oxygen, a quartz collimator with a honey comb protection device in the front to be mounted onto a KF25 flange.

setup of the collimator onto a KF25 flange

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A New Honey Comb Device To Protect Expensive Quartz Window Of View Port

Wow! It’s a long time not to write an article in this blog. In the past years, a new developed honey comb device which provides a solution to solve the contamination problem on quartz window of view port. From time to time, the contamination onto the quartz (or pyrex) window of the view port coming from the processes of plasma CVD, etching, sputtering, arc PVD, evaportation PVD always raise up the maintenance costs and reduce the productivity. Nowadays a state-of-the-art honey comb device is well-developed.


Fig. 1 Up to 600°C without center ring in CF type; Up to 200°C in KF type.


There are several selections to fit the view port’s type and dimension. With the aid of this honey comb protection device, the quartz (or pyrex) window can be protected not to be contaminated. It’s also very easy to clean this device by following some simple instructions.

Fig. 2 Different diameters are available.

We are very appreciated in the pictures provided by PLASUS.