Closed Loop PID Control For Reactive Sputtering Applications / Magetron Sputtering Sources Advanced Coatings in HIPIMS hybrid MF magnetron sputtering with the aid of EMICON closed loop feedback control Recenly lots of requests o... 30 3 月, 2017
HIPIMS hybrid MF sputtering / HIPIMS Magnetron Sputter HIPIMS hybrid/super-imposed MF for a perfect magnetron sputtering process Power supply is very impor... 30 3 月, 2017