Good coating protection by a honey comb protection device in front of a quartz collimator lens (PECVD process)
On a PECVD process to coat SiO2 layer with SiH4 precursor reacted with oxygen, a quartz collimator with a honey
All skills related to MF, HIPIMS, Plasma Emission Monitoring and Controlling for reactive plasma
On a PECVD process to coat SiO2 layer with SiH4 precursor reacted with oxygen, a quartz collimator with a honey