Example 1: Ar/Cr Plasma
(spectral resolution approx. 0.3 nm)
Example 2: Ar Plasma with chamber moisture
(spectral resolution approx. 1.5 nm)
在SpecLine軟體內使用Polynomial and Wiener-Fourier Filters濾波器
Example 1: Ar/Cr Plasma
(spectral resolution approx. 0.3 nm)
Example 2: Ar Plasma with chamber moisture
(spectral resolution approx. 1.5 nm)