在SpecLine軟體內使用Polynomial and Wiener-Fourier Filters濾波器
Example 1: Ar/Cr Plasma (spectral resolution approx. 0.3 nm) Example 2: Ar Plasma with chamber moisture (spectral resolution approx. 1.5 nm)
Category Plasma Spectra Analysis
Example 1: Ar/Cr Plasma (spectral resolution approx. 0.3 nm) Example 2: Ar Plasma with chamber moisture (spectral resolution approx. 1.5 nm)