標籤: AOT

Advanced Coatings in HIPIMS hybrid MF magnetron sputtering with the aid of EMICON closed loop feedback control 借助EMICON閉環反饋控制，在HIPIMS混合MF磁控濺射中的先進塗層。

3 月 30, 2017

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作者:

Robert Jann

分類: Closed Loop PID Control For Reactive Sputtering Applications, Magetron Sputtering Sources

Recently lots of requests on advanced coating configura…
在APCVD及CCVD中的应用中使用光谱监测的工艺控制

11 月 20, 2012

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作者:

Robert Jann

分類: 電漿製程監控