標籤: PECVD

推薦: 用於製程開發、生產控制和機器學習的尖端等離子體監控技術

4 月 30, 2025

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作者:

Robert Jann

分類: Plasma Process Monitor and Control, 電漿製程監控

Cutting-Edge Plasma Monitoring Techniques for Process D…
Good coating protection by a honey comb protection device in front of a quartz collimator lens (PECVD process)

12 月 28, 2011

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作者:

Robert Jann

分類: EMICON accessories, Optical Parts

On a PECVD process to coat SiO2 layer with SiH4 precurs…