推薦: 用於製程開發、生產控制和機器學習的尖端等離子體監控技術
Cutting-Edge Plasma Monitoring Techniques for Process Development, Production Control and Machine Learning Speaker: Dr. Thomas Schütte – PLASUS GmbH 2025/5/20
Tag: PECVD
Good coating protection by a honey comb protection device in front of a quartz collimator lens (PECVD process)
On a PECVD process to coat SiO2 layer with SiH4 precursor reacted with oxygen, a quartz collimator with a honey