PLASUS has extended its well known EMICON series for plasma monitoring and process control with a cutting edge development for HIPIMS and pulsed plasma applications. The EMICON FS system is finally ready for market rollout.

PLASUS擴展了其著名的EMICON系列，用於等離子體監測和過程控制，為HIPIMS和脈衝等離子體應用提供了尖端開發。EMICON FS系統終於準備好推向市場了。

For Fast Spectroscopic measurements, the developers at PLASUS have achieved to reduce the integration time of the spectral data acquisition considerably to values well below the pulse length of typical HIPIMS processes.

對於快速光譜測量，PLASUS的開發人員已經實現了將光譜數據採集的積分時間大大縮短到遠低於典型HIPIMS過程的脈衝長度的值。

This results in an unprecedented time resolution of the spectral data which enables a deeper insight in the evolution of plasma composition during the pulse. For example, the following data shows how the concentration of argon builds up almost immediately after the voltage onset whereas the metallic species follow by a delay of 20 µs . Note that there is no difference between the time behavior of the neutral Ti and the ionic Ti⁺.

這導致了光譜數據前所未有的時間解析度，從而可以更深入地了解脈衝期間等離子體成分的演變。例如，以下數據顯示了氬氣的濃度在電壓啟動后幾乎立即增加，而金屬物質則延遲了 20 μs。請注意，中性 Ti 和離子 Ti+ 的時間行為沒有區別。

So far, such time resolution has been available only with spectroscopic high-end equipment. In contrast to those tools the EMICON FS system allows continuous monitoring with 24/7 operation. The recording below shows the pulse sequence of the transition of a HIPIMS process from the reactive mode to the metallic mode. Valuable process details can be revealed not only in R&D applications but also in production machines.

到目前為止，這種時間解析度僅適用於光譜高端設備。與這些工具相比，EMICON FS 系統允許 24/7 全天候運行的連續監控。下面的記錄顯示了 HIPIMS 過程從反應模式過渡到金屬模式的脈衝序列。有價值的工藝細節不僅可以在研發應用中揭示，還可以在生產機器中揭示。

Just like all other EMICON systems the EMICON FS system can be equipped with a wide range of industrial interfaces for integration in existing production machines. Previously unreachable sophisticated process control schemes such as synchronized substrate biasing in real-time can now be realized at a very reasonable price tag.

與所有其他EMICON系統一樣，EMICON FS系統可以配備廣泛的工業介面，以集成到現有的生產機器中。以前無法實現的複雜過程控制方案，例如即時同步基板偏置，現在可以以非常合理的價格實現。